HIGH VOLTAGE POWER SUPPLY FOR SEMICONDUCTORS INSPECTION
- Voltage range: 5 to 30 kV
- current: 0.5 to 6 mA
- power: 15 to 30 W
SEM, Semiconductor Inspection System Power Supply
AESS series high voltage power supply offers ultra-high performance featuring ultra-low ripple, low temperature coefficient, and high stability.
Using the expert know-how and state-of-the-art technology cultivated over Matsusada precision's 30 years of history, the AESS series achieved world-class performance.
The series is equipped with the voltage and current monitors as standard, and the digital control is available via RS-232C. You can also use it via LAN, USB, and RS-485 with separate adapters.
FEATURES AND BENEFITS
- Ultra low ripple and High stability
- Low temperature coefficient, 25 ppm/°C (Below 10 ppm/°C model is available)
- With voltage and current monitor
- Remote control via RS-232C
Control via LAN, USB, RS-422, RS-485 or GPIB is also available.
However, it is different method from the control with Matsusada's digital controller CO/USB series.
Please contact our sales representative for detail.
APPLICATIONS
- Semiconductor Fabrication Equipment
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Electron Beam Lithography (EBL)
- Focused Ion Beam (FIB)
- Surface analysis instruments
Models
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AESS-5P3 | 5 kV | 3 mA | 10 mVp-p |
| AESS-5P6 | 6 mA | 10 mVp-p | |
| AESS-10P1.5 | 10 kV | 1.5 mA | 20 mVp-p |
| AESS-10P3 | 3 mA | 20 mVp-p | |
| AESS-15P1 | 15 kV | 1 mA | 30 mVp-p |
| AESS-15P2 | 2 mA | 30 mVp-p | |
| AESS-30P0.5 | 30 kV | 0.5 mA | 50 mVp-p |
| AESS-30P1 | 1 mA | 50 mVp-p | |
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AESS-5N3 | -5 kV | 3 mA | 10 mVp-p |
| AESS-5N6 | 6 mA | 10 mVp-p | |
| AESS-10N1.5 | -10 kV | 1.5 mA | 20 mVp-p |
| AESS-10N3 | 3 mA | 20 mVp-p | |
| AESS-15N1 | -15 kV | 1 mA | 30 mVp-p |
| AESS-15N2 | 2 mA | 30 mVp-p | |
| AESS-30N0.5 | -30 kV | 0.5 mA | 50 mVp-p |
| AESS-30N1 | 1 mA | 50 mVp-p | |
Specifications
Dimensions
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-
AESS series Datasheet
Date: 2023-07-28 rev.07
PDF (914 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
The account registration is necessary for downloading
-
AESS series Datasheet
Date: 2023-07-28 rev.07
PDF (914 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
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