Electrostatic Chuck Power Supplies

Electrostatic chuck power supplies or ESC supplies are high-voltage power supplies specialized for electrostatic chucks(E-chuck, ESC). Matsusada Precision offers a wide range of high-voltage power supply series for electrostatic chucks. Based on customer feedback, we recognized a considerable need for smooth and reliable chucking and wafer release in the Semiconductor and R&D marketplaces. A wide-range list of models is available from single polar type, bipolar type, dual tracking type, generic and multi-purpose type, or compact module type, which will be required for wafers and LCD glass substrates. We can also provide OEM and custom power supplies for semiconductor manufacturing equipment.

Benchtop Type

Rack Mount Type

Module Type

Electrostatic Chuck Power Supplies

Search for related to Electrostatic Chuck Power Supplies