Electrostatic Chuck Power Supply Reversible Output Module
High Voltage Power Supply
ELECTROSTATIC CHUCK POWER SUPPLY REVERSIBLE MODULE
MEC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. Compact module type and easy to integrate into a system. Smooth wafer release is possible with polarity change by remote control. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) applications
- Smooth release of wafer with polarity reverse function
- Polarity change and output voltage control with remote signal
- Output Voltage and Current monitor
MAIN APPLICATION
Models
Specifications
For details, download the datasheet below.
Example of waveform
Character of output voltage setting
Options
- -L(1m)
-
High Voltage output cable 1 meter
- -L(3m)
-
High Voltage output cable 3 meters
- -L(5m)
-
High Voltage output cable 5 meters
How to Order
When ordering, add Option No. to Model No. in alphabetical, order.
Example: MEC-1R10-L(1m)
Diagram
Dimensions
Download
![High voltage power supply especially for E-Chuck Selection Guide]()
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
![Safety and Usage of High voltage Power supply]()
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
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![High voltage power supply especially for E-Chuck Selection Guide]()
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
![Safety and Usage of High voltage Power supply]()
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
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