Tech Tips

Considerable reduction in tact time and process working time

Do you want to reduce the time for chucking and releasing object?

1. With our original technology of high-speed response, Matsusada Precision E-chuck power supplies can apply voltage quickly. Chucking is just quick and smooth without time delay.

2. Matsusada Precision E-chuck power supplies have functions not only to turn OFF high voltage but also to compulsorily reduce the high voltage on the electrostatic chuck, wafer, or glass substrate when releasing.

E-chuck power supplies

* Rapid and smooth chucking and releasing can remarkably contribute to the reduction of the entire time and process working time.

Long life and highly reliable design

Do failures or malfunctions cause extra time and labor?

  1. Our ECA series and EJC series use no electromechanical relays for polarity inversion. For this reason, they are not affected by the contact life of relays, and can be used for a long time without failure.
  2. RF filter, which is optionally available, protects the power supply from RF noise which can cause a failure or malfunction.

Unique and useful functions for E-chuck application

The design of Matsusada Precision E-chuck power supplies have various functions such as two-channel outputs for bipolar E-chuck, High Voltage output with the desired waveform, polarity reversible, forced grounding or relay to separate E-chuck and power supply. Our E-chuck power supplies have all the functions required for E-chuck applications. Controls which fit users' required logic are possible.

Opening the relay prevent voltage drop on the chuck while it is transmitted to the next process.

>>Click here for a list of high-voltage power supplies for electrostatic chucks.