Electrostatic Chuck (E-Chuck) Power Supplies

Maximize throughput and reduce cycle time

High-speed response for efficient chucking and de-chucking

1. Utilizing proprietary high-speed response technology, Matsusada Precision's E-chuck power supplies enable rapid voltage application. This ensures fast, stable chucking operations with minimal delay.

2. For de-chucking, the power supplies not only turn off the high voltage but also actively discharge residual charges on the electrostatic chuck, wafer, or glass substrate.

* Smooth and rapid chucking and de-chucking significantly contribute to overall process efficiency.

Long service life and high reliability

Solid-state design for maintenance-free operation

1. The ECA series and EJC series utilize solid-state switching for polarity inversion instead of electromechanical relays. This design eliminates contact wear issues, ensuring stable, long-term operation.
2. Optional RF filters are available to protect the power supply from RF noise, preventing potential malfunctions and ensuring consistent performance in demanding environments.

Versatile functions optimized for E-chuck applications

Matsusada Precision offers a comprehensive range of features tailored for electrostatic chuck applications. Key functions include two-channel outputs for bipolar E-chucks, user-defined high-voltage output waveforms, polarity reversal, and forced grounding. An isolation relay is also available to disconnect the E-chuck from the power supply, enabling charge retention during wafer transfer. These features allow for control logic fully customized to specific process requirements.

>> Click here to view the lineup of high-voltage power supplies for electrostatic chucks.