HIGH VOLTAGE POWER SUPPLY FOR ELECTRON BEAM, ELECTRON GUN
- Ultra low ripple
- high stability
- Accelerator voltage
-10 kV to -60 kV - Selectable each floating channel output
Multi-output high voltage power supply for electron beam, electron gun
Scanning Electron Microscope(SEM), Electron beam power supply, Acceleration voltage: -10 kV to -60 kV, each channel can be selected individually
FEATURES AND BENEFITS
- Ultra Low Ripple and High stability
- Low temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
- Floating level (4 channels programmable power supply with voltage monitor and current monitor for each channel)
- Ground level (1 channel programmable accelerator power supply with voltage monitor and current monitor)
- Digital control via RS-232C is available. (LAN, USB, RS-485, and GPIB are also supported. Feel free to contact our sales representatives for details.)
- Up to -160 kV acceleration voltages are available.
- Compact and lightweight with multi-channel output
- Custom configuration with additional output is available.
APPLICATIONS
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Electron Beam Lithography (EBL)
- Semiconductor Fabrication Equipment
- Auger Electron Spectroscopy (AES)
- Surface analysis instruments
- Electron gun
- Microfocus X-ray generators
Models
| Model | Ch. Name | Reference level | Output | |
|---|---|---|---|---|
| Voltage | Current | |||
| HEB series | Filament | Accelerator | +2 V, +8 V, and so on | 3 A, 5 A |
| Suppressor | Accelerator | -1 kV, -2 kV, and so on | 50 µA, 100 µA | |
| Extractor | Accelerator | +5 kV, +10 kV, -10 kV and so on | 500 µA, 3 mA and so on | |
| Focus | Accelerator | +2 kV, +5 kV, and so on | 50 µA, 1000 µA and so on | |
| Accelerator | Ground | -10 kV, -30 kV, -60 kV and so on | 100 µA, 700 µA and so on | |
| Focus | Ground | + 30 kV | 50 µA | |
| Grid | Ground | - 10 kV | 50 µA | |
Specifications
Options
- -LFC
Filament (ch1) center common
Dimensions
Download
If you are unable to download a file
Please try the following solution.
- Please press Ctrl+F5 to clear the cache of your web browser and try again.
- Please restart your web browser and log in again to try again.
- Please change your web browser to another browser and try again.
- Restart the computer and try again.
- Please try again on a different computer.
-
HEB series Datasheet
Date: 2023-07-28 rev.08
PDF (971 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
The account registration is necessary for downloading
-
HEB series Datasheet
Date: 2023-07-28 rev.08
PDF (971 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
Please click here if you are not registered yet to our site.
Please click here if you are already registered to our site.
Information on related articles in Technical Knowledge
- Safety and Usage of High Voltage Power Supply
- How to Select a High Voltage Power Supply for Laboratory Analyzers
- High voltage power supplies for Scanning Electron Microscope and Mass Spectrometry
- What to do if you get electrocuted? What to do in case of electric shock(electrical injury) and how to handle high voltage
