Semiconductor Fabrication Equipment is the general term for equipment used to manufacture semiconductors. There is equipment for each semiconductor manufacturing process, and the equipment is used in a clean room.

Semiconductor manufacturing plants are called semiconductor fabrication plant (commonly called a fab; sometimes foundry), and many processes are automated.

For more information on semiconductor processes, please refer to the following.

Semiconductor

Matsusada Precision manufactures and sells a variety of power supplies used in manufacturing equipment for semiconductors, LCD, EL, etc.

Recommended products

R4G/R4GN series

R4G/R4GN series

output voltage
0 to 650 V
output current
0 to 10 A
output power
0 to 180 W
Compact and High resolution

High resolution and Ultra low noise, Digital communication function

R4GT series

R4GT series

output voltage
0 to 36 V
output current
0 to 5 A
output power
0 to 90 W
High Resolution Programmable DC Power Supply

Pulse and Ramp sequence operation, Various Functions equipped

TB series

TB series

output voltage
0 to 1000 V
output current
0 to 108 A
output power
0 to 1080 W
Wide range output/Turbo power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

REK/REKJ series

REK/REKJ series

output voltage
0 to 1500 V
output current
0 to 1200 A
output power
0 to 15 kW
Versatile, High-performance

Compact and High power, PFC circuit and universal input, Various operations is available

RE series

RE series

output voltage
0 to 650 V
output current
0 to 1200 A
output power
0 to 15 kW
Wide lineup

Low noise, High power, compact and high efficiency

PRT series

PRT series

output voltage
0 to 1500 V
output current
0 to 510 A
output power
0 to 15 kW
High Power DC Turbo Power Supply

Achieve a wide range of output, Variable internal resistance function

AU series

AU series

output voltage
0 to 120 kV
output current
0 to 2.2 A
output power
0 to 2.2 kW
Low profile and lightweight

Digital interface is available. Wide range of over 300 models, Various remote control and monitor functions

ECA series

ECA series

output voltage
0 to ±10kV
output current
0 to 30mA
output power
0 to 30W
Electrostatic chuck

Fast response, High reliability and long life

EJC series

EJC series

output voltage
0 to ± 5kV
output current
0 to 30 mA
output power
0 to 30 W
Electrostatic chuck

Fast response, High reliability and long life

EPR series

EPR series

output voltage
0 to 30 kV
output current
0 to 150 mA
output power
0 to 150 W
High Power 150 W with 84 mm wide

Small and lightweight design with universal input for use anywhere

AMPS series

AMPS series

output voltage
0 to ±30 kV
output current
0 to ±2 A
output power
0 to 1.2 kW
Ultra high speed/High voltage

Ultra high slew rate 1200 V/µs, High-speed response of frequency bandwidth 100 kHz

AMJ series

AMJ series

output voltage
0 to ±4 kV
output current
0 to ±80 mA
output power
0 to 40 W
Ultra Compact and Fast Response

High speed response 75 kHz, DC bias function