Semiconductor Fabrication Equipment is the general term for equipment used to manufacture semiconductors. There is equipment for each semiconductor manufacturing process, and the equipment is used in a clean room.

Semiconductor manufacturing plants are called semiconductor fabrication plant (commonly called a fab; sometimes foundry), and many processes are automated.

For more information on semiconductor processes, please refer to the following.

Semiconductor

Matsusada Precision manufactures and sells a variety of power supplies used in manufacturing equipment for semiconductors, LCD, EL, etc.

Recommended products

R4G/R4GN series

R4G/R4GN series

voltage range
6 to 650 V
current
0.1 to 10 A
power
12 to 180 W
Compact and High resolution
Linear DC power supply

High resolution and Ultra low noise, Digital communication function

R4GT series

R4GT series

voltage range
6 to 36 V
current
0.01 to 0.3 A
power
0.1 to 7.2 W
High Resolution Programmable DC Power Supply

Pulse and Ramp sequence operation, Various Functions equipped

TB series

TB series

voltage range
35 to 1000 V
current
1 to 108 A
power
360W, 720W, 1080W
Wide range programmable
DC power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

REK/REKJ series

REK/REKJ series

voltage range
6 to 1500 V
current
1 to 1200 A
power
0.77 to 15 kW
Versatile, High-performance
DC power supply

Compact and High power, PFC circuit and universal input, Various operations is available

RE series

RE series

voltage range
10 to 650 V
current
1.2 to 1200 A
power
0.75 to 15 kW
147 models, programmable DC Power Supply

Low noise, High power, compact and high efficiency

PRT series

PRT series

voltage range
80 to 1500 V
current
33 to 510 A
power
5 to 15 kW
High Power Wide Range DC Power Supply

Achieve a wide range of output, Variable internal resistance function

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Low profile and lightweight
High voltage power supply

Digital interface is available. Wide range of over 300 models, Various remote control and monitor functions

ECA series

ECA series

Voltage range
±1 to ±10 kV
Current
0.5 to 30 mA
Power
5 to 30 W
for Electrostatic chuck

Fast response, High reliability and long life

EJC series

EJC series

Voltage range
±1 to ±5 kV
Current
1.2 to 30 mA
Power
6 W, 30 W
for Electrostatic chuck

Fast response, High reliability and long life

EPR series

EPR series

voltage range
1 to 30 kV
current
1 to 150 mA
power
30 to 150 W
High Power 150 W Benchtop
High Voltage Power Supply

Small and lightweight design with universal input for use anywhere

AMPS series

AMPS series

Voltage range
±0.6 to ±30 kV
Current
±0.02 to ±2 A
Power
0.4 to 1.2 kW
Ultra high-speed High-voltage Amplifier

Ultra high slew rate 1200 V/µs, High-speed response of frequency bandwidth 100 kHz

AMJ series

AMJ series

Voltage range
±0.5 to ±4 kV
Current
±10 to ±80 mA
Power
20 to 40 W
Compact and Fast Response
High voltage Amplifier

High speed response 75 kHz, DC bias function