Surface analysis is the process of analyzing the surface of a solid to determine the surface shape, physical properties, chemical bonds, boundary condition, and reaction status of the material.
In general, analyzers shine light from a light source onto an object to be analyzed, and analyze the light emitted from the object to determine its physical properties.

There are several types of surface analysis: electron detection, X-ray detection, light detection, ion detection, and scanning with a probe.

The following methods and devices are used to detect electrons in surface analysis.

The following methods and equipment are used to detect X-rays in surface analysis.

The following methods and devices are used to detect light in surface analysis.

  • Infrared Spectroscopy (IR)
  • Fourier Transform Infrared Spectroscopy (FTIR)/li>
  • Cathode Luminescence(CL)
  • Photoluminescence(PL)

The following methods and instruments are used to detect ions in surface analysis.

  • Secondary Ion Mass Spectrometry (SIMS)
  • Glow Discharge Mass Spectrometry (GDMS)
  • Rutherford Backscattering Spectrometry (RBS)
  • Elastic Recoil Detection Analysis (ERDA)
  • Nuclear Reaction Analysis (NRA)
  • Field Ion Microscope (FIM)

The following methods and instruments are used for scanning probes in surface analysis.

  • Scanning Tunnelling Microscope (STM)
  • Atomic Force Microscope (AFM)
  • Field Emission Electron Microscope (FEM)
  • Friction Force Microscope (FFM)
  • Magnetic Force Microscope (MFM)
  • Scanning Maxwell Stress Microscope (SMM)