An ion beam is a beam produced by accelerating ions at high speed. Ion is an atom or mass of atoms that is positively or negatively charged. Ion acceleration is to move an ion to the destination by applying an arbitrary voltage. The momentum of acceleration increases in proportion to the magnitude of the applied voltage. According to applications of ion transfer, electrodes to apply the voltage are known for accelerating electrode, extraction electrode, suppressing electrode, deflecting electrode, deflecting electrode, etc. They are used in ion engines, ion beam sputtering, ion implantation, focused ion beam (FIB), and accelerators. In order to prevent the potential inside the device from being biased against the accelerating ion potential, there are some cases where it may be electrically neutralized by generating ions to the accelerating one. The device is called "Neutralizer".

To generate an ion beam for FIB, a liquid metal ion source (LMIS) consisting of a needle-shaped tungsten filament with gallium attached is used. When the filament is heated and voltage is applied to the extraction electrode, an ion beam is generated from the tip. The generated ions are then controlled by the accelerator's electric and magnetic fields to form a narrow, directional stream. Ion beam steering is used in ion beam scanning. Ions which are extracted from the ion source are focused by a condenser lens (CL), and the ion beam is scanned by an electrostatic deflector. Ion beams are used for a wide range of applications such as ion beam implantation, ion beam processing and scanning ion microscope (SIM).

The ion beam generator consists of an ion source (ion gun), an electromagnetic lens in the accelerator, and a deflector. The ion beam passes through an accelerator and is used for ion implantation of impurities into semiconductors, surface cleaning by ion milling, surface processing, surface modification, and surface and internal analysis. The ion beam is accelerated and decelerated by an electric field in a vacuum, and deflected by a magnetic field. Ion mass sorting is performed by bending the ions in a magnetic field, and energy analysis is performed by decelerating electric field method and electrostatic field deflection analysis method.

Ion source conceptual diagram

Matsusada Precision offers a variety of power supply equipment for ion acceleration, extraction, suppression, deflection, focusing, gridding and neutralization. Matsusada power supplies designed for electrostatic deflectors have various kinds of specifications, and especially we provide high voltage amplifiers featuring the world's highest level of response speed. With the DC bias function, the scanning reference point of scanning can be easily adjusted.

Ion source conceptual diagram
Related words:
  • ion beam
  • ion source
  • ion gun
  • acceleration
  • ion acceleration
  • accelerator
  • ion implantation
  • impurity implantation
  • beam transport deflection
  • surface processing
  • surface modification
  • electrostatic deflection (including ion beam steering)
  • ion milling
  • electrostatically controlling ion beams
  • electrostatic lenses
Power supplies for Ion Beam

Recommended products

Matsusada Precision offers ion beam power supplies that combine power supplies for ion extraction, acceleration, deflection, focusing, and grid grids, as well as power supply devices that can be used for each of these applications.

HIB series

HIB series

output voltage
0 to 60 kV/-30 kV
output current
0 to 5 A
Ion Beam Power Supply

Each channel can be selected separately

FDC series

FDC series

output voltage
7.5 V
output current
0 to 5 A
output power
0 to 37.5 W
Electron Gun and Ion Source Filament Power Supply

Floating withstand voltage 30 kV

AKP series

AKP series

output voltage
0 to +120 kV/-120 kV
output current
0 to 13 A
output power
0 to 13 kW
High voltage and Large output

Master/slave function further enables extension at maximum 52 kW.

AK series

AK series

output voltage
0 to +120 kV/-120 kV
output current
0 to 4.25 A
output power
0 to 6.4 kW
High power 6.4 kW/Compact

6.4 kW in 4 U, Digital interface is available. Wide lineup of over 100 models

AU series

AU series

output voltage
0 to +120kV/-120kV
output current
0 to 2.2A
output power
0 to 2.2kW
Low profile and lightweight

Digital interface is available.Wide lineup of over 300 models, Various remote control and monitor functions

AUH series

AUH series

output voltage
0 to 200kV
output power
0 to 2kW
output current
0 to 13.3mA
Ultra high voltage, High power

High power of 2 kW, Safety design, Ultra high voltage of maximum 200 kV in the 19-inch rack size

SK series

SK series

output voltage
0 to 10 kV
output current
0 to 20 mA
output power
0 to 200 W
High voltage/High speed pulse power supply

Ultra compact and light weight design, High power design applicable in low impedance

SKS series

SKS series

output voltage
0 to 10kV
output current:
0 to 10mA avg.
High-Speed High-Voltage Pulse Power Supply

High-speed operation with 50 kHz repetition frequency

AMPS series

AMPS series

output voltage
0 to ±30kV
output current
0 to ±2A
output power
0 to 1.2kW
Ultra high speed/High voltage

Ultra high slew rate 1200 V/µs, High-speed response of frequency bandwidth 100 kHz

AMP series

AMP series

output voltage
0 to ±40 kV
output current
0 to ±2A
output power
0 to 1.2kW
Fast response of slew rate 700 V/µ s

Slew rate with actual load is as high as 700 V/µs.

AMS/AMT series

AMS/AMT series

output voltage
0 to ±20kV
output current
0 to ±200W
output power
0 to 100mA
Fast response of slew rate 360V/µs

High speed response 360 V/µs, DC bias function, Various types of output wave forms according to the input wave

AMJ series

AMJ series

output voltage
0 to ±4kV
output current
0 to ±80mA
output power
0 to 40W
Ultra Compact and Fast Response

High speed response 75kHz, DC bias function

REK/REKJ series

REK/REKJ series

output votage
0 to 1500V
output current
0 to 1200A
output power
0 to 15kW
Versatile, High-performance

Compact and High power, PFC circuit and universal input, Various operations is available

TB series

TB series

output voltage
0 to 1000V
output current
0 to 108A
output power
0 to 1080W
Wide range output/Turbo power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

R4K-80 series

R4K-80 series

output voltage
0 to 320V
output current
0 to 10A
output power
0 to 80W
Ultra slim design and High power 80W

Various lineups for output current control at 0.1mA increment

R4G/R4GN series

R4G/R4GN series

output voltage
0 to 650V
output current
0 to 10A
output power
0 to 180W
Compact and High resolution

High resolution and Ultra low noise, Digital communication function