Ion implantation is a method of changing the properties of a solid or modifying its surface by accelerating and injecting ionized atoms or molecules into the solid. In particular, the method of implanting impurity elements to form semiconductors, called dopants, is called doping technology, and is the most widely used method of ion implantation.

A typical ion implanter consists of several parts, including an ion source to generate the target ions, a mass spectrometer to extract the necessary ions, an accelerator tube to accelerate the ions, a scanning section to scan the ion beam, and a section to detect the dose. The end station, where ions are injected into the solid, is under high vacuum conditions.

Matsusada Precision offers a wide variety of high voltage power supplies such as high voltage filament power supplies for ion sources, high voltage power supplies for extraction grids, constant current power supplies for analyzer magnets, high voltage power supplies up to 200kV for ion acceleration, fast high voltage bipolar power supplies for ion beam scanning, and high voltage power supplies for secondary electron suppression.

Ion implantation
maker WEB site models
Applied Materials https://www.appliedmaterials.com/semiconductor/products/ion-implant VIISTA® 3000XP
VIISTA® 900 3D
VIISTA® 900XP
VIISTA® HCP
VIISTA® PLAD
VIISTA® TRIDENT
Varian Semiconductor Equipment (now Applied Materials)
Axcelis https://www.axcelis.com/ Purion H
Purion Dragon
Purion H200
Purion XE
Purion EXE
Purion VXE
Purion Xemax
Purion XE
Purion M
Nissin https://www.nissin-ion.co.jp/en/ IMPHEAT
EXCEED400HY
EXCEED3000AH/-Ev/-Evo/-Evo2
EXCEED9600A/-Ev/-Evo/-Evo2
SEN https://shi-ion.jp/english/ SHX-Ⅲ(HC)
NV-GSDⅢ-180
MC3-Ⅱ(MC)
S-UHE(HE)
SS-UHE(HE) Saion
Ulvac https://www.ulvac.com/systems/IonImplanter IMX-3500
SOPHI-200/260
IH-860
AIBT https://www.aibt.com.tw/ iPulsar Plus
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Matsusada Precision offers a wide variety of high voltage power supplies such as high voltage filament power supplies for ion sources, high voltage power supplies for extraction grids, constant current power supplies for analyzer magnets, high voltage power supplies up to 200kV for ion acceleration, fast high voltage bipolar power supplies for ion beam scanning, and high voltage power supplies for secondary electron suppression.

HIB series

HIB series

output voltage
0 to 60 kV/-30 kV
output current
0 to 5 A
Ion Beam Power Supply

Each channel can be selected separately

PBR series

PBR series

output voltage
0 to 1500V
output current
0 to 360A
output power
0 to 15kW
Regenerative DC power supply

Bidirectional power supply with power running and regeneration

PRT series

PRT series

output votage
0 to 1500V
output current
0 to 510A
output power
0 to 15kW
High Power DC Turbo Power Supply

Achieve a wide range of output, Variable internal resistance function

AKP series

AKP series

output voltage
0 to +120 kV/-120 kV
output current
0 to 13 A
output power
0 to 13 kW
High voltage and Large output

Master/slave function further enables extension at maximum 52 kW.

AK series

AK series

output voltage
0 to +120 kV/-120 kV
output current
0 to 4.25 A
output power
0 to 6.4 kW
High power 6.4 kW/Compact

6.4 kW in 4 U, Digital interface is available. Wide lineup of over 100 models

AU series

AU series

output voltage
0 to +120kV/-120kV
output current
0 to 2.2A
output power
0 to 2.2kW
Low profile and lightweight

Digital interface is available.Wide lineup of over 300 models, Various remote control and monitor functions

REK/REKJ series

REK/REKJ series

output votage
0 to 1500V
output current
0 to 1200A
output power
0 to 15kW
Versatile, High-performance

Compact and High power, PFC circuit and universal input, Various operations is available

TB series

TB series

output voltage
0 to 1000V
output current
0 to 108A
output power
0 to 1080W
Wide range output/Turbo power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

AC + DC

DRS series

DRS series

output power
0 to 2000VA
output voltage
0 to 310V
output frequency
1 to 550Hz
Programmable AC Power Source

Simple operations and high power in overwhelming compact size

AC + DC

DRK series

DRK series

output power
0 to 8000VA
output voltage
0 to 300Vac
output frequency
1 to 550A
High power AC Power Source in slim

Our original switching method has achieved high-quality output

K12-R series

K12-R series

output voltage
0 to +30 kV/-30 kV
output current
0 to 1.2 mA
output power
0 to 12 W
Reversible Polarity & High Stability

Ideal for SEM and MASS

K3-R series

K3-R series

output voltage
0 to +10 kV/-10 kV
output current
0 to 3 mA
output power
0 to 3 W
MASS spectrometer reversible power supplies

Ideal for SEM and MASS