Ion implantation is a method of changing the properties of a solid or modifying its surface by accelerating and injecting ionized atoms or molecules into the solid. In particular, the method of implanting impurity elements to form semiconductors, called dopants, is called doping technology, and is the most widely used method of ion implantation.

A typical ion implanter consists of several parts, including an ion source to generate the target ions, a mass spectrometry to extract the necessary ions, an accelerator tube to accelerate the ions, a scanning section to scan the ion beam, and a section to detect the dose. The end station, where ions are injected into the solid, is under high vacuum conditions.

Matsusada Precision offers a wide variety of high voltage power supplies such as high voltage filament power supplies for ion sources, high voltage power supplies for extraction grids, constant current power supplies for analyzer magnets, high voltage power supplies up to 200kV for ion acceleration, fast high voltage bipolar power supplies for ion beam scanning, and high voltage power supplies for secondary electron suppression.

Ion implantation
maker WEB site models
Applied Materials https://www.appliedmaterials.com/semiconductor/products/ion-implant VIISTA® 3000XP
VIISTA® 900 3D
VIISTA® 900XP
VIISTA® HCP
VIISTA® PLAD
VIISTA® TRIDENT
Varian Semiconductor Equipment (now Applied Materials)
Axcelis https://www.axcelis.com/ Purion H
Purion Dragon
Purion H200
Purion XE
Purion EXE
Purion VXE
Purion Xemax
Purion XE
Purion M
Nissin https://www.nissin-ion.co.jp/en/ IMPHEAT
EXCEED400HY
EXCEED3000AH/-Ev/-Evo/-Evo2
EXCEED9600A/-Ev/-Evo/-Evo2
SEN https://shi-ion.jp/english/ SHX-Ⅲ(HC)
NV-GSDⅢ-180
MC3-Ⅱ(MC)
S-UHE(HE)
SS-UHE(HE) Saion
Ulvac https://www.ulvac.com/systems/IonImplanter IMX-3500
SOPHI-200/260
IH-860
AIBT https://www.aibt.com.tw/ iPulsar Plus
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Matsusada Precision offers a wide variety of high voltage power supplies such as high voltage filament power supplies for ion sources, high voltage power supplies for extraction grids, constant current power supplies for analyzer magnets, high voltage power supplies up to 200kV for ion acceleration, fast high voltage bipolar power supplies for ion beam scanning, and high voltage power supplies for secondary electron suppression.

HIB series

HIB series

voltage range
60 kV
current
5 A
Ion Beam Power Supply

Each channel can be selected separately

PBR series

PBR series

voltage range
80 to 1500 V
current
20 to 360 A
power
5, 10, 15kW
Regenerative DC power supply

Bidirectional power supply with power running and regeneration

PRT series

PRT series

voltage range
80 to 1500 V
current
33 to 510 A
power
5 to 15 kW
High Power Wide Range DC Power Supply

Achieve a wide range of output, Variable internal resistance function

AKP series

AKP series

voltage range
1 to 120 kV
current
0.1 to 13 A
power
12 to 13 kW
High Power High Voltage power supply

Master/slave function further enables extension at maximum 52 kW.

AK series

AK series

voltage range
1 to 120 kV
current
25 to 4250 mA
power
3 to 6.4 kW
High power 6.4 kW/Compact
High Voltage Power Supply

6.4 kW in 4 U, Digital interface is available. Wide range of over 100 models

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Low profile and lightweight
High voltage power supply

Digital interface is available. Wide range of over 300 models, Various remote control and monitor functions

REK/REKJ series

REK/REKJ series

voltage range
6 to 1500 V
current
1 to 1200 A
power
0.77 to 15 kW
Versatile, High-performance
DC power supply

Compact and High power, PFC circuit and universal input, Various operations is available

TB series

TB series

voltage range
35 to 1000 V
current
1 to 108 A
power
360W, 720W, 1080W
Wide range programmable
DC power supply

"Turbo function" installed, Compact size, Suppressing voltage/current overshoot

AC + DC

DRS series

DRS series

Power
Up to 2000 VA
Voltage range
155/310 Vac
Frequency
1 to 550 Hz
Programmable AC Power Source

Simple operations and high power in overwhelming compact size

AC + DC

DRK series

DRK series

Power
Up to 8000 VA
Voltage range
150/300 Vac
Frequency
1 to 550 Hz
High power Rack mount AC Power Source

Our original switching method has achieved high-quality output

K12-R series

K12-R series

voltage range
±10 to ±30 kV
current
0.4 to 1.2 mA
power
12 W
Reversible Polarity & High Stability

Ideal for Mass spectrometry

K3-R series

K3-R series

voltage range
±1 to ±10 kV
current
0.3 to 3 mA
power
3 W
Mass spectrometry reversible power supplies

Ideal for Scanning Electron Microscopy and Mass spectrometry