HIGH VOLTAGE POWER SUPPLY WITH HIGHLY STABLE OUTPUT
- Voltage range: 5 to 30 kV
- Current: 0.5 to 6 mA
- Power: 15 to 30 W
SEM, Semiconductor Inspection System Power Supply
The AESS series high voltage power supply offers exceptional performance with ultra-low ripple, low temperature coefficient, and high stability.
Leveraging over 30 years of expertise and advanced technology, the AESS series delivers outstanding performance.
Furthermore, in terms of functionality, this high-performance power supply is equipped with a voltage/current monitor as standard, and digital control via RS-232C is also realized using the attached optical fiber cable and optical isolation converter.
FEATURES AND BENEFITS
- Ultra-low ripple and high stability
- Low temperature coefficient of 25 ppm/°C (models with less than 10 ppm/°C are also available)
- Equipped with voltage and current monitors
- Remote control via isolated the Opto-RS232C converter
APPLICATIONS
- Semiconductor Fabrication Equipment
- Scanning Electron Microscope (SEM)
- CD-SEM (Critical Dimension Scanning Electron Microscope)
- Electron Beam Lithography (EBL)
- Focused Ion Beam (FIB)
- Surface analysis instruments
- Auger Electron Spectroscopy (AES)
Models
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AESS-5P3 | 5 kV | 3 mA | 10 mVp-p |
| AESS-5P6 | 6 mA | 10 mVp-p | |
| AESS-10P1.5 | 10 kV | 1.5 mA | 20 mVp-p |
| AESS-10P3 | 3 mA | 20 mVp-p | |
| AESS-15P1 | 15 kV | 1 mA | 30 mVp-p |
| AESS-15P2 | 2 mA | 30 mVp-p | |
| AESS-30P0.5 | 30 kV | 0.5 mA | 50 mVp-p |
| AESS-30P1 | 1 mA | 50 mVp-p | |
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AESS-5N3 | -5 kV | 3 mA | 10 mVp-p |
| AESS-5N6 | 6 mA | 10 mVp-p | |
| AESS-10N1.5 | -10 kV | 1.5 mA | 20 mVp-p |
| AESS-10N3 | 3 mA | 20 mVp-p | |
| AESS-15N1 | -15 kV | 1 mA | 30 mVp-p |
| AESS-15N2 | 2 mA | 30 mVp-p | |
| AESS-30N0.5 | -30 kV | 0.5 mA | 50 mVp-p |
| AESS-30N1 | 1 mA | 50 mVp-p | |
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single-phase
- Output voltage control
-
[Local] Rotary encoder on front panel
[Analog remote] External control voltage 0 to 10 Vdc
[Digital remote] Command
Dimensions
Accessories
- Application software
-
PSS2en series: Remote control, Test workflow design, and Data logging
Click here for the PSS2en seriesPSS2en is the dedicated software that can actuate various power supplies, electronic loads, and digital controllers for power supplies manufactured by Matsusada Precision Inc. with a simple setup.
It is perfect for the aging test, the burn-in test, and the withstand voltage test for electronic parts, as well as for the endurance test, intermittent/continuous operation test, or various simulation tests for automobile electric components.
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-
AESS series Datasheet
Date: 2024-08-07 rev.09
PDF (888 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
Login Required
-
AESS series Datasheet
Date: 2024-08-07 rev.09
PDF (888 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
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