Electron Beam power supply
- -10 kV to -60 kV Accelerator Voltage
- Selectable each floating channel output
Multi-output high voltage power supply for electron beam, electron gun
Features
- Ultra Low Ripple and High stability
- Low temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
- Ground level: 1 channel programmable Accelerator power supply with voltage monitor and current monitor
- Floating level: 4 channels programmable power supply with voltage monitor and current monitor for each channel
- Custom configuration with additional output is available.
- Controllable via RS-232C, RS-485, RS-422, GPIB and USB.
- Custom models up to 100 kV are available.
Applications
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Electron Beam (E-beam) etching
- Auger Electron Spectrometer (AES)
- Electron gun
Models
| Model | Ch. Name | Reference level | Output | |
|---|---|---|---|---|
| Voltage | Current | |||
| HEB series | Filament | Accelerator | +2 V, +8 V and so on | 3 A, 5 A |
| Suppressor | Accelerator | -1 kV, -2 kV and so on | 50 µA, 100 µA | |
| Extractor | Accelerator | +5 kV, +10 kV, -10 kV and so on | 500 µA, 3 mA and so on | |
| Focus | Accelerator | +2 kV, +5 kV and so on | 50 µA, 1000 µA and so on | |
| Accelerator | Ground | -10 kV, -30 kV, -60 kV and so on | 100 µA, 700 µA and so on | |
| Focus | Ground | + 30 kV | 50 µA | |
| Grid | Ground | - 10 kV | 50 µA | |
Specifications
Options
-LFC: Filament (ch1) center common
Dimensions
Download
-
HEB series Datasheet
Date: 2020-05-26 rev. 05
PDF (142 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
The account registration is necessary for downloading
-
HEB series Datasheet
Date: 2020-05-26 rev. 05
PDF (142 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
