Electron Beam power supply
- -10 kV to -60 kV Accelerator Voltage
- Selectable each floating channel output
Multi-output high voltage power supply for electron beam, electron gun
Features
- Ultra Low Ripple and High stability
- Low temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
- Floating level: 4 channels programmable power supply with voltage monitor and current monitor for each channel
- Ground level: 1 channel programmable Accelerator power supply with voltage monitor and current monitor
- Custom configuration with additional output is available.
- Digital control via RS-232C is available. (LAN, USB, RS-485, and GPIB are also supported. Feel free to contact our sales representatives for details.)
- Custom models up to 100 kV are available.
Applications
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Electron Beam Lithography (EBL)
- Semiconductor Fabrication Equipment
- Auger Electron Spectroscopy (AES)
- Surface analysis instruments
- Electron gun
Models
| Model | Ch. Name | Reference level | Output | |
|---|---|---|---|---|
| Voltage | Current | |||
| HEB series | Filament | Accelerator | +2 V, +8 V and so on | 3 A, 5 A |
| Suppressor | Accelerator | -1 kV, -2 kV and so on | 50 µA, 100 µA | |
| Extractor | Accelerator | +5 kV, +10 kV, -10 kV and so on | 500 µA, 3 mA and so on | |
| Focus | Accelerator | +2 kV, +5 kV and so on | 50 µA, 1000 µA and so on | |
| Accelerator | Ground | -10 kV, -30 kV, -60 kV and so on | 100 µA, 700 µA and so on | |
| Focus | Ground | + 30 kV | 50 µA | |
| Grid | Ground | - 10 kV | 50 µA | |
Specifications
Options
-LFC: Filament (ch1) center common
Dimensions
Download
-
HEB series Datasheet
Date: 2022-01-11 rev. 06
PDF (1,357 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
The account registration is necessary for downloading
-
HEB series Datasheet
Date: 2022-01-11 rev. 06
PDF (1,357 KB)
-
Safety and Usage of High voltage Power supply
Date: 2020-10-09 rev. 02
PDF (1,366 KB)
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