• HEB series | High Voltage power supply Rack mount | Matsusada Precision
  • HEB series | High Voltage power supply Rack mount | Matsusada Precision

Electron Beam power supply

  • -10 kV to -60 kV Accelerator Voltage
  • Selectable each floating channel output

Multi-output high voltage power supply for electron beam, electron gun

Features

  • Ultra Low Ripple and High stability
  • Low temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
  • Ground level: 1 channel programmable Accelerator power supply with voltage monitor and current monitor
  • Floating level: 4 channels programmable power supply with voltage monitor and current monitor for each channel
  • Custom configuration with additional output is available.
  • Controllable via RS-232C, RS-485, RS-422, GPIB and USB.
  • Custom models up to 100 kV are available.

Applications

  • Scanning Electron Microscope (SEM)
  • Critical Dimension Scanning Electron Microscope (CD-SEM)
  • Electron Beam (E-beam) etching
  • Auger Electron Spectrometer (AES)
  • Electron gun

Models

Model Ch. Name Reference level Output
Voltage Current
HEB series Filament Accelerator +2 V, +8 V and so on 3 A, 5 A
Suppressor Accelerator -1 kV, -2 kV and so on 50 µA, 100 µA
Extractor Accelerator +5 kV, +10 kV, -10 kV and so on 500 µA, 3 mA and so on
Focus Accelerator +2 kV, +5 kV and so on 50 µA, 1000 µA and so on
Accelerator Ground -10 kV, -30 kV, -60 kV and so on 100 µA, 700 µA and so on
Focus Ground + 30 kV 50 µA
Grid Ground - 10 kV 50 µA

Specifications

For details, download the datasheet below.

Options

-LFC: Filament (ch1) center common

Dimensions

For details, download the datasheet below.

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High Voltage power supplies (Benchtop/Rack mount)

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