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  • HEB/HIB series | High Voltage Power Supply Rackmount | Matsusada Precision
  • HEB/HIB series | High Voltage Power Supply Rackmount | Matsusada Precision

Ion Beam High-Voltage Power Supply

Ultra-low ripple and high stability

  • Accelerator voltage: +10 kV to +60 kV
  • Configurable floating channel outputs
  • Maximum output voltage: 60 kV
  • Maximum output current: 5 A

All-in-One High-Voltage Power Supply for Ion Beam Applications

The HIB series is a multi-channel high-voltage power supply designed specifically for demanding ion beam applications, including Focused Ion Beam (FIB) systems. This series integrates multiple power sources required for an ion beam column—accelerator, filament, suppressor, extractor, and lens—into a single compact chassis. This all-in-one design simplifies system integration and minimizes high-voltage wiring, resulting in improved system stability and reduced noise susceptibility.
Optimized for high performance, the HIB series features ultra-low ripple and high stability, enabling precise control of the ion beam for high-resolution imaging and fine processing. While the standard platform supports acceleration voltages up to 60 kV, the system offers extensive customization options to match specific ion source and column requirements.

FEATURES AND BENEFITS

  • Integrated Solution for FIB: Provides multiple outputs for the accelerator, filament, suppressor, extractor, and lens in a single unit.
  • Customizable Configuration: Select the optimal electrode power supply configuration for your specific ion gun.
  • High Performance: Ultra-low ripple and high stability for precision applications.
  • Temperature Stability: Low temperature coefficient of 25 ppm/°C (10 ppm/°C models available as an option).
  • Floating Outputs: Four programmable channels, each equipped with voltage and current monitors.
  • Ground Output: One programmable channel with voltage and current monitors.
  • Safety and Control: Fiber-optic galvanic isolation ensures safe remote control operation.
  • Extended Range: Acceleration voltage up to 100 kV available upon request.
  • Expandability: Additional ground-referenced voltage channels available upon request.
  • Custom Options: Please contact us for configurations not listed here.

APPLICATIONS

Models

Model Ch.Name Reference level Output
Voltage Current
HIB series Filament Accelerator +2 V, +5 V, +6 V, +8 V 3 A, 5 A
Suppressor Accelerator -300 V, -600 V, -1 kV, -2 kV 50 µA, 100 µA
Extractor Accelerator -10 kV, -12 kV, -15 kV 500 µA
Lens1 Accelerator +15 kV, +10 kV, +5 kV, -5 kV, -10 kV, -15 kV 50 µA
Accelerator Ground +10 kV, +15kV, +30 kV, +40kV, +50 kV, +60 kV 100 µA, 250 µA, 300 µA, 500 µA, 700 µA, 750 µA
Lens2 Ground -30 kV, +30 kV 50 µA
Lens3 Ground -30 kV, +30 kV 50 µA

Select voltage according to your ion beam.

Specifications

Input voltage
85 to 264 Vac, 50/60 Hz, Single-phase
Output voltage control
[Local] Rotary encoder and keypad on the front panel (each channel)
[Digital remote] Command

For details, download the datasheet below.

Options

-LFC
Filament (ch1) center common configuration

Dimensions

For details, download the datasheet below.

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