Ion Beam Power Supply
Ultra low ripple and High stability
- +10 to +60 kV accelerator voltage
- Selectable each floating channel output
- Voltage range: 60 kV
- Current: 5 A
All-in-One High Voltage Power Supply with Ultra-Low Ripple and High Stability for Ion Beam Applications.
The HIB series is a high-performance, multi-channel high-voltage power supply specifically designed for demanding ion beam applications, including Focused Ion Beam (FIB) systems.
This series integrates the multiple power systems required for an ion beam column-such as acceleration, filament, suppressor, extractor, and lens-into a single compact chassis. This simplifies the overall system setup and minimizes high-voltage wiring, contributing to a stable system with reduced susceptibility to noise.
Matsusada Precision's proprietary ultra-low ripple and high-stability technology minimizes output ripple noise while ensuring exceptional stability. This enables precise control of the ion beam, supporting high-resolution imaging and precision processing at levels previously difficult to achieve.
Based on a platform with a maximum acceleration voltage of 60 kV, the HIB series offers extensive customization to flexibly configure each channel according to your unique ion source and ion beam column requirements. Our uncompromising "Made in Japan" quality, from component selection through the entire manufacturing process, enhances the value of your equipment.
FEATURES AND BENEFITS
- Designed for Focused Ion Beam (FIB), integrated high voltage power supply with multiple outputs of ion gun in the accelerator, filament, suppressor, extractor, and lens
- Selectable the best electrode power supply for your ion gun
- Ultra low ripple and high stability
- Low temperature coefficient of 25 ppm/°C, with optional models offering 10 ppm/°C.
- Floating level: Four programmable channels, each equipped with voltage and current monitors.
- Ground level: One programmable channel with voltage and current monitors.
- Fiber-optic galvanic isolation for enhanced safety in remote control.
- Maximum acceleration voltage 100kV available on request
- Additional ground-referenced voltage channels on request
- Other options available than listed below
APPLICATIONS
- Focused Ion Beam (FIB)
- Particle accelerator
- Ion implantation equipmet
- Ion gun
Models
| Model | Ch.Name | Reference level | Output | |
|---|---|---|---|---|
| Voltage | Current | |||
| HIB series | Filament | Accelerator | +2 V, +5 V, +6 V, +8 V | 3 A, 5 A |
| Suppressor | Accelerator | -300 V, -600 V, -1 kV, -2 kV | 50 µA, 100 µA | |
| Extractor | Accelerator | -10 kV, -12 kV, -15 kV | 500 µA | |
| Lens1 | Accelerator | +15 kV, +10 kV, +5 kV, -5 kV, -10 kV, -15 kV | 50 µA | |
| Accelerator | Ground | +10 kV, +15kV, +30 kV, +40kV, +50 kV, +60 kV | 100 µA, 250 µA, 300 µA, 500 µA, 700 µA, 750 µA | |
| Lens2 | Ground | -30 kV, +30 kV | 50 µA | |
| Lens3 | Ground | -30 kV, +30 kV | 50 µA | |
Select voltage according to your ion beam.
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single-phase
- Output voltage control
-
[Local] Rotary encoder and keypad on the front panel (each channel)
[Digital remote] Command
Options
- -LFC
- Filament (ch1) center common configuration
Dimensions
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-
HIB series Datasheet
Date: 2025-10-22 rev 06
PDF (1,432 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
Login Required
-
HIB series Datasheet
Date: 2025-10-22 rev 06
PDF (1,432 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
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