Electron Beam Power Supply
- Ultra-low ripple
- high stability
- Accelerator voltage
-10 kV to -60 kV - Selectable each floating channel output
All-in-One High Voltage Power Supply for E-Beams with Ultra-Low Ripple and Multiple Outputs
In state-of-the-art applications such as Scanning Electron Microscopes (SEM) and e-beam lithography systems, the quality of the electron beam is a critical factor that dictates overall performance.
The HEB series is a multi-output high voltage power supply, proudly made in Japan, engineered to meet these demanding requirements. Its defining feature is an ultra-low ripple and high stability design, which minimizes noise to enable crystal-clear high resolution imaging and highly precise beam control.
This series integrates multiple power supplies essential for electron gun operation-including acceleration voltage, filament, suppressor, extractor, and focus-into a single, compact, and sleek enclosure. Each channel can be individually selected, allowing for a fully customized configuration tailored to your specific needs. Furthermore, by adding an output channel, it is possible to incorporate a retarding power supply that achieves low acceleration. This all-in-one design significantly simplifies system integration and saves valuable space.
Equipped with standard features like digital control via an optical fiber link and comprehensive protection circuits, the HEB series supports both advanced control and safe operation. Backed by Matsusada Precision's renowned quality and reliability, this power supply is the ideal partner to enhance your R&D and improve your equipment's performance.
FEATURES AND BENEFITS
- Ultra Low Ripple and High stability
- Low temperature coefficient of 25 ppm/°C, with optional models offering 10 ppm/°C.
- Floating level: Four programmable channels, each equipped with voltage and current monitors.
- Ground level: One programmable accelerator power supply channel with voltage and current monitors.
- Fiber-optic galvanic isolation for enhanced safety in remote control.
- Up to -160 kV acceleration voltages are available.
- Compact and lightweight with multi-channel output
- Custom configuration with additional output is available.
APPLICATIONS
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Defect Review Scanning Electron Microscope (DR-SEM)
- Electron Beam Lithography (EBL)
- Semiconductor Fabrication Equipment
- Auger Electron Spectroscopy (AES)
- Surface analysis instruments
- Electron gun
- Microfocus X-ray generators
Models
| Model | Ch. Name | Reference level | Output | |
|---|---|---|---|---|
| Voltage | Current | |||
| HEB series | Filament | Accelerator | +2 V, +8 V, and so on | 3 A, 5 A |
| Suppressor | Accelerator | -1 kV, -2 kV, and so on | 50 µA, 100 µA | |
| Extractor | Accelerator | +5 kV, +10 kV, -10 kV and so on | 500 µA, 3 mA and so on | |
| Focus | Accelerator | +2 kV, +5 kV, and so on | 50 µA, 1000 µA and so on | |
| Accelerator | Ground | -10 kV, -30 kV, -60 kV and so on | 100 µA, 700 µA and so on | |
| Focus | Ground | + 30 kV | 50 µA | |
| Grid | Ground | - 10 kV | 50 µA | |
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single-phase
- Output voltage control
-
[Local] Rotary encoder and keypad on the front panel (each channel)
[Digital remote] Command
Options
- -LFC
Filament (ch1) center common
Dimensions
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HEB series Datasheet
Date: 2025-10-21 rev 10
PDF (1,766 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
Login Required
-
HEB series Datasheet
Date: 2025-10-21 rev 10
PDF (1,766 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
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