Rack Mount High Voltage Power Supplies AES/AESS series

  • AES/AESS series
  • AES/AESS series

AES/AESS series

Power supply for SEM and Semiconductors with an ultra low ripple

SEM, Semiconductor Inspection System Power Supply

AES/AESS series are designed for applications require highly stable output. The ripple noise is as small as 10 mV (5kV model), and the stability is also minimum (10 ppm/Hr AESS series). Digital interface is equipped for more convenient operation.

Specially designed for SEM application with quite clean output.
AES/AESS series are high voltage power supplies with quite stable output for various high voltage applications, which require precise outputs. The low ripple and temperature coefficient secure you the quite stable output voltage. 4-digits digital meter and digital interface will secure more precise monitoring and setting.

Features and Benefits

  • Ultra Low Ripple and High stability
  • Low temperature coefficient, 25ppm/°C (Below 10ppm/°C model is available.)
  • With Voltage and current monitor
  • RS-232C control 
    Controllable via RS-232C, 485, 422, GPIB and USB.

Applications

  • SEM (Scanning Electron Microscope)
  • CV SEM
  • E-Beam etching
  • FIB (Focused Ion Beam)
  • AES (Auger electron spectroscopy)

Models

AES Series (Low ripple type)

Positive polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AES-5P3 0 to 5 3 100
AES-5P6 6 100
AES-10P1.5 0 to 10 1.5 200
AES-10P3 3 200
AES-15P1 0 to 15 1 300
AES-15P2 2 300
AES-30P0.5 0 to 30 0.5 500
AES-30P1 1 500

Negative polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AES-5N3 0 to 5 3 100
AES-5N6 6 100
AES-10N1.5 0 to 10 1.5 200
AES-10N3 3 200
AES-15N1 0 to 15 1 300
AES-15N2 2 300
AES-30N0.5 0 to 30 0.5 500
AES-30N1 1 500

AESS Series (Ultra low ripple type)

Positive polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AESS-5P3 0 to 5 3 10
AESS-5P6 6 10
AESS-10P1.5 0 to 10 1.5 20
AESS-10P3 3 20
AESS-15P1 0 to 15 1 30
AESS-15P2 2 30
AESS-30P0.5 0 to 30 0.5 50
AESS-30P1 1 50

Negative polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AESS-5N3 0 to 5 3 10
AESS-5N6 6 10
AESS-10N1.5 0 to 10 1.5 20
AESS-10N3 3 20
AESS-15N1 0 to 15 1 30
AESS-15N2 2 30
AESS-30N0.5 0 to 30 0.5 50
AESS-30N1 1 50

Download

The account registration is necessary for downloading

In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.

Please click here if you are not registered yet to our site.

Membership Registration (Free)

Please click here if you are already registered to our site.

Log in

High Voltage power supplies (Rack Mount/Benchtop)

Search for related to High Voltage power supplies (Rack Mount/Benchtop)