• AES/AESS series | High Voltage power supply Rack mount | Matsusada Precision
  • AES/AESS series | High Voltage power supply Rack mount | Matsusada Precision

High Voltage Power Supply for SEM and Semiconductors with an ultra-low ripple

SEM, Semiconductor Inspection System Power Supply

AES/AESS series are high voltage power supplies with quite stable output for various high voltage applications, which require precise outputs.

The low ripple and temperature coefficient secure you the quite stable output voltage. 4-digits digital meter and digital interface will secure more precise monitoring and setting.

Features and Benefits

  • Ultra Low Ripple and High stability
  • Low temperature coefficient, 25ppm/°C (Below 10ppm/°C model is available.)
  • With Voltage and current monitor
  • RS-232C control
    Controllable via RS-232C, RS-485, RS-422, GPIB and USB.

Applications

  • SEM (Scanning Electron Microscope)
  • CD SEM
  • E-Beam etching
  • FIB (Focused Ion Beam)
  • AES (Auger electron spectroscopy)

Models

AES Series (Low ripple type)

Positive polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AES-5P3 0 to 5 3 100
AES-5P6 6 100
AES-10P1.5 0 to 10 1.5 200
AES-10P3 3 200
AES-15P1 0 to 15 1 300
AES-15P2 2 300
AES-30P0.5 0 to 30 0.5 500
AES-30P1 1 500

Negative polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AES-5N3 0 to 5 3 100
AES-5N6 6 100
AES-10N1.5 0 to 10 1.5 200
AES-10N3 3 200
AES-15N1 0 to 15 1 300
AES-15N2 2 300
AES-30N0.5 0 to 30 0.5 500
AES-30N1 1 500

AESS Series (Ultra low ripple type)

Positive polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AESS-5P3 0 to 5 3 10
AESS-5P6 6 10
AESS-10P1.5 0 to 10 1.5 20
AESS-10P3 3 20
AESS-15P1 0 to 15 1 30
AESS-15P2 2 30
AESS-30P0.5 0 to 30 0.5 50
AESS-30P1 1 50

Negative polarity output

Model Output
Voltage [kV] Current [mA] Ripple [mVp-p]
AESS-5N3 0 to 5 3 10
AESS-5N6 6 10
AESS-10N1.5 0 to 10 1.5 20
AESS-10N3 3 20
AESS-15N1 0 to 15 1 30
AESS-15N2 2 30
AESS-30N0.5 0 to 30 0.5 50
AESS-30N1 1 50

Specifications

For details, download the datasheet below.

Dimensions

For details, download the datasheet below.

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