Discontinued
High Voltage Power Supply for SEM and Semiconductors with an ultra-low ripple
SEM, Semiconductor Inspection System Power Supply
AES series are high voltage power supplies with quite stable output for various high voltage applications, which require precise outputs.
The low ripple and temperature coefficient secure you the quite stable output voltage.
4-digits digital meter and digital interface will secure more precise monitoring and setting.
Features and Benefits
- Ultra Low Ripple and High stability
- Low temperature coefficient, 25ppm/°C (Below 10ppm/°C model is available.)
- With voltage and current monitor
- Remote control via RS-232C
Control via USB, RS-485, RS-422 or GPIB is also available.
However, it is different method from the control with Matsusada precision's digital controller CO/USB series. Please contact our sales representative for detail.
Applications
- Semiconductor Fabrication Equipment
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Electron Beam Lithography (EBL)
- Focused Ion Beam (FIB)
- Surface analysis instruments
Models
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AES-5P3 | 5 kV | 3 mA | 100 mVp-p |
| AES-5P6 | 6 mA | 100 mVp-p | |
| AES-10P1.5 | 10 kV | 1.5 mA | 200 mVp-p |
| AES-10P3 | 3 mA | 200 mVp-p | |
| AES-15P1 | 15 kV | 1 mA | 300 mVp-p |
| AES-15P2 | 2 mA | 300 mVp-p | |
| AES-30P0.5 | 30 kV | 0.5 mA | 500 mVp-p |
| AES-30P1 | 1 mA | 500 mVp-p | |
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AES-5N3 | -5 kV | 3 mA | 100 mVp-p |
| AES-5N6 | 6 mA | 100 mVp-p | |
| AES-10N1.5 | -10 kV | 1.5 mA | 200 mVp-p |
| AES-10N3 | 3 mA | 200 mVp-p | |
| AES-15N1 | -15 kV | 1 mA | 300 mVp-p |
| AES-15N2 | 2 mA | 300 mVp-p | |
| AES-30N0.5 | -30 kV | 0.5 mA | 500 mVp-p |
| AES-30N1 | 1 mA | 500 mVp-p | |
Specifications
Dimensions
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-
AES series Datasheet
Date: 2022-4-05 rev.04
PDF (1,455 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
The account registration is necessary for downloading
-
AES series Datasheet
Date: 2022-4-05 rev.04
PDF (1,455 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
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