Discontinued
High Voltage Power Supply for SEM and Semiconductors with an ultra-low ripple
Power Supplies for SEM and Semiconductor Inspection Systems
The AES series consists of high-voltage power supplies designed for precision applications requiring high stability, such as scanning electron microscopes (SEM).
With ultra-low ripple and a low temperature coefficient, the series ensures stable output performance.
It features a 4-digit digital meter and precise digital interface options for remote monitoring and control.
Features and Benefits
- Ultra-low ripple and high stability
- Low temperature coefficient: 25 ppm/°C (High-stability options < 10 ppm/°C available)
- Equipped with voltage and current monitors
- Remote control via RS-232C
Control via USB, RS-485, RS-422, or GPIB is available as an option.
Note: The control protocol differs from that of the CO/USB series interface adapters. Please contact us for details.
Applications
- Semiconductor Fabrication Equipment
- Scanning Electron Microscopes (SEM)
- Critical Dimension Scanning Electron Microscopes (CD-SEM)
- Electron Beam Lithography (EBL)
- Focused Ion Beam (FIB) Systems
- Surface Analysis Instruments
Models
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AES-5P3 | 5 kV | 3 mA | 100 mVp-p |
| AES-5P6 | 6 mA | 100 mVp-p | |
| AES-10P1.5 | 10 kV | 1.5 mA | 200 mVp-p |
| AES-10P3 | 3 mA | 200 mVp-p | |
| AES-15P1 | 15 kV | 1 mA | 300 mVp-p |
| AES-15P2 | 2 mA | 300 mVp-p | |
| AES-30P0.5 | 30 kV | 0.5 mA | 500 mVp-p |
| AES-30P1 | 1 mA | 500 mVp-p | |
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AES-5N3 | -5 kV | 3 mA | 100 mVp-p |
| AES-5N6 | 6 mA | 100 mVp-p | |
| AES-10N1.5 | -10 kV | 1.5 mA | 200 mVp-p |
| AES-10N3 | 3 mA | 200 mVp-p | |
| AES-15N1 | -15 kV | 1 mA | 300 mVp-p |
| AES-15N2 | 2 mA | 300 mVp-p | |
| AES-30N0.5 | -30 kV | 0.5 mA | 500 mVp-p |
| AES-30N1 | 1 mA | 500 mVp-p | |
Specifications
Dimensions
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-
AES series Datasheet
Date: 2022-4-05 rev.04
PDF (1,455 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
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-
AES series Datasheet
Date: 2022-4-05 rev.04
PDF (1,455 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
