Vacuum plasma treatment (low-pressure plasma treatment) is a technology for cleaning and surface treatment of materials by uniformly irradiating the surface of the material with plasma in a vacuum. It is used in a wide range of fields, from the manufacture of semiconductors and electronic components to medical applications.
Plasma treatment cleans materials by decomposing and vaporizing microscopic organic matter adhering to the material surface. It also has the effect of surface modification by breaking molecular bonds on the material surface and changing the surface composition. In addition, the plasma decorates the surface of the material with hydroxyl groups, making it hydrophilic and less likely to repel liquids.
Vacuum plasma treatment is used, for example, in the manufacture of microchips to improve the hydrophilicity of the surface of patterned PDMS (dimethylpolysiloxane) and to improve pattern adhesion. In vacuum plasma processing, plasma is generated by applying a high-voltage current to electrodes and filaments inside a vacuum device.
Matsusada Precision offers a wide range of high-voltage power supplies for heating electrodes and filaments.
- Related words:
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- Plasma
- Semiconductor
- Surface Treatment
- Langmuir probe
Recommended products
Power supplies for vacuum plasma processing are available.
