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Vacuum plasma treatment (low-pressure plasma treatment) is a technology for cleaning and surface treatment of materials by uniformly irradiating the surface of the material with plasma in a vacuum. It is used in a wide range of fields, from the manufacture of semiconductors and electronic components to medical applications.

Plasma treatment cleans materials by decomposing and vaporizing microscopic organic matter adhering to the material surface. It also has the effect of surface modification by breaking molecular bonds on the material surface and changing the surface composition. In addition, the plasma decorates the surface of the material with hydroxyl groups, making it hydrophilic and less likely to repel liquids.

Vacuum plasma treatment is used, for example, in the manufacture of microchips to improve the hydrophilicity of the surface of patterned PDMS (dimethylpolysiloxane) and to improve pattern adhesion. In vacuum plasma processing, plasma is generated by applying a high-voltage current to electrodes and filaments inside a vacuum device.

Matsusada Precision offers a wide range of high-voltage power supplies for heating electrodes and filaments.

Plasma Treatment
how plasma-treatment bonding works
Related words:
  • Plasma
  • Semiconductor
  • Surface Treatment
  • Langmuir probe

Recommended products

Power supplies for vacuum plasma processing are available.

TA series

TA series

voltage range
1 to 2 kV
current
0.7 to 1.5 mA
Ultra-compact High Voltage Power Supply for PMT

Low ripple, Space-saving, and High reliability

TC series

TC series

voltage range
1 to 2 kV
current
0.7 to 1.5 mA
Ultra-compact High Voltage Power Supply for PMT

Low ripple, Space-saving, and High reliability

TG series

TG series

voltage range
0.2 to 2 kV
current
0.7 to 7.5 mA
Ultra-compact High Voltage Power Supply for PMT

A wide range of output voltage

TU-M series

TU-M series

voltage range
1.2 kV
current
0.6 mA
Miniature High Voltage Power Supply

Ultra compact and high performance

TFQ series

TFQ series

voltage range
1.5 kV
current
1 mA
Ultra compact High Voltage Power Supply

Wide range of output voltage

ES series

ES series

voltage range
1 to 5 kV
current
0.6 to 15 mA
power
3 to 15 W
42 models, High Voltage Power Supply

Compact benchtop units for PMT, MCP applications

TM series

TM series

voltage range
0.8 to 3 kV
current
0.5 to 2 mA
power
1.5 W
Ultra Low Ripple PCB Mountable High Voltage Power Supply

Low noise due to 6-sided metal shielding

TD series

TD series

voltage range
0.35 to 2 kV
current
2.5 to 14 mA
power
5 W
High power Power Supply for photomultiplier

Low ripple/noise and high-end performance

TEH series

TEH series

voltage range
1 kV
current
10 mA
power
10 W
High power High Voltage Power Supply

High power 10 W for PMT

AE series

AE series

voltage range
1 to 150 kV
current
0.2 to 30 mA
power
15 to 120 W
Ultra low noise and high stability
High Voltage Power Supply

High stability 50ppm/Hr, Digital interface is available. Ultra low ripple 10ppm and spike noise with our proprietary switching circuit

AESS series

AESS series

voltage range
5 to 30 kV
current
0.5 to 6 mA
power
15 to 30 W
Ultra High Stability High Voltage Power Supply

Low temperature coefficient 25 ppm/°C, For SEM, E-beam, FIB Semiconductor applications, Ultra low ripple 2 ppm and high stability 10 ppm/Hr

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Low profile and lightweight
High voltage power supply

Digital interface is available. Wide range of over 300 models, Various remote control and monitor functions

J4/J6 series

J4/J6 series

voltage range
0.5 to 5 kV
current
0.5 to 8 mA
power
2.5 to 6W
High Voltage Power Supply for PMT

Ideal for photo tubes, GM tubes, and radiation counters

JB series

JB series

voltage range
0.3 to 2 KV
current
1 to 8 mA
power
1.8 to 2.5 W
High Voltage Power Supply for PMT

High power and Low noise

ASX series

ASX series

voltage range
±3.1 kV
current
5 mA
power
15.5 W
Bestseller model among various international research institutes

Ultra-low ripple 1mVp-p with high stability 50ppm/H, Perfect for driving photomultiplier tubes