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Physical Vapor Deposition (PVD) is a process used to deposit thin films for applications in semiconductor manufacturing, as well as on cutting tools and molds. This category of deposition includes various methods, such as resistive heating evaporation, electron beam deposition, molecular beam epitaxy, ion plating, ion beam deposition, and sputtering.

Matsusada Precision manufactures and sells power supplies for PVD and other vapor deposition systems.

Recommended products

RK series

RK series

voltage range
6 to 800 V
current
0.6 to 180 A
power
385 to 1200 W
Versatile Benchtop
DC Power Supply

Offers 400 W output in a compact 2.8-inch wide chassis.

RE series

RE series

voltage range
10 to 650 V
current
1.2 to 1200 A
power
0.75 to 15 kW
A Programmable DC Power Supply Available in 147 Models

Low noise, High power, compact and high efficiency

REK/REKJ series

REK/REKJ series

voltage range
6 to 1500 V
current
1.2 to 1200 A
power
0.77 to 15 kW
Versatile, High-performance
DC power supply

Compact and high power, featuring a PFC circuit and universal input for various operations.

PRT series

PRT series

voltage range
80 to 1500 V
current
33 to 510 A
power
5 to 15 kW
High Power Autoranging DC Power Supply

Features autoranging output and a variable internal resistance function.

R4G/R4GN series

R4G/R4GN series

voltage range
6 to 650 V
current
0.1 to 10 A
power
12 to 180 W
A Compact, High-Resolution
Linear DC Power Supply

High resolution, ultra-low noise, and digital interface

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Rack mount High Voltage DC Power Supply

The AU series offers a low-profile, lightweight design with over 300 models. It features remote control and monitoring functions, with a digital interface available.

REH series

REH series

voltage range
0.75 to 1.2 kV
current
1.1 to 20 A
power
1.1 to 15 kW
High-Power DC Power Supply
(Up to 1.2 kV)

1 kV/15 kW class design with enhanced safety features

AK series

AK series

voltage range
1 to 120 kV
current
25 to 4250 mA
power
3 to 6.4 kW
High power 6.4 kW/Compact
High Voltage Power Supply

The AK series delivers high power (6.4 kW) in a compact 4U package. Digital interface is available.

AKP series

AKP series

voltage range
1 to 120 kV
current
0.1 to 13 A
power
12 to 13 kW
High-voltage High-current power supply

The AKP series is scalable up to 52 kW using its proprietary master-slave function.