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Ion beam deposition is the process of producing an ion beam as a thin film material at the ion source and accelerating to form a thin film. Typically used cluster-ion beam deposition produces excellent films with good crystalline properties.

Clusters are lumps of many atoms or molecules, and particularly when the atoms and molecules are gases, they are called gas clusters. The gas cluster is created using a high-pressure material gas by blowing it into a vacuum through a narrow, trumpet-shaped tube or a nozzle. The generated clusters are ionized with the electron impact method.

In this method, the high-speed electrons hit the cluster, and the electrons are bounced off the cluster, which makes the cluster positively charged. An electric field is applied to the ionized clusters and they are hit against the sample. It is used for processing and reforming.

Focused Ion Beam Source, Optical Thin Film Coatings

Power supplies which are a core product of the ion beam deposition are available in a wide lineup of Matsusada Precision to meet applications like ion beam acceleration, extraction, suppression, deflection, grid and neutralization.

Recommended products

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Low profile and lightweight
High voltage power supply

Digital interface is available. Wide range of over 300 models, Various remote control and monitor functions

AUH series

AUH series

voltage range
150 to 200kV
current
6 to 13.3mA
power
1.2 to 2kW
Ultra high voltage, High power
High Voltage Power Supply

High power of 2 kW, Safety design, Ultra high voltage of maximum 200 kV in the 19-inch rack size

EPR series

EPR series

voltage range
1 to 30 kV
current
1 to 150 mA
power
30 to 150 W
High Power 150 W Benchtop
High Voltage Power Supply

Small and lightweight design with universal input for use anywhere

SK series

SK series

Voltage range
0.3 to 10 kV
Rise time
15 nsec
High speed High voltage pulse power supply

Ultra compact and lightweight design, High power design applicable in low impedance

SKS series

SKS series

Voltage range
10 kV
Rise time
20 nsec
High-Speed High-Voltage Pulse Power Supply

High-speed operation with 50 kHz repetition frequency

AMPS series

AMPS series

Voltage range
±0.6 to ±30 kV
Current
±0.02 to ±2 A
Power
0.4 to 1.2 kW
Ultra high-speed High-voltage Amplifier

Ultra high slew rate 1200 V/µs, High-speed response of frequency bandwidth 100 kHz

AMP series

AMP series

voltage range
±0.6 to ±40 kV
current
±0.01 to ±2 A
power
0.1 to 1.2 kW
High-speed High-voltage Amplifier

Slew rate with actual load is as high as 700 V/µs.

AMS/AMT series

AMS/AMT series

Voltage range
±0.6 to ±10 kV
Current
±2 to ±100 mA
Power
20 to 200 W
Fast response High voltage Amplifier

High speed response 360 V/µs, DC bias function, Various types of output wave forms according to the input wave

AMJ series

AMJ series

Voltage range
±0.5 to ±4 kV
Current
±10 to ±80 mA
Power
20 to 40 W
Compact and Fast Response
High voltage Amplifier

High speed response 75 kHz, DC bias function

REK/REKJ series

REK/REKJ series

voltage range
6 to 1500 V
current
1 to 1200 A
power
0.77 to 15 kW
Versatile, High-performance
DC power supply

Compact and High power, PFC circuit and universal input, Various operations is available

TB series

TB series

voltage range
35 to 1000 V
current
1 to 108 A
power
360W, 720W, 1080W
Wide range programmable
DC power supply

"Turbo function" installed, Compact, Suppressing voltage/current overshoot

R4K-80 series

R4K-80 series

voltage range
16 to 320 V
current
0.5 to 10 A
power
80 W
Ultra slim, 4-digit, DC Power Supply

Various lineups for output current control at 0.1 mA increment

R4G/R4GN series

R4G/R4GN series

voltage range
6 to 650 V
current
0.1 to 10 A
power
12 to 180 W
Compact and High resolution
Linear DC power supply

High resolution and Ultra low noise, Digital interface

AC + DC

DRS series

DRS series

Power
Up to 2000 VA
Voltage range
155/310 Vac
Frequency
1 to 550 Hz
Programmable AC Power Source

Simple operations and high power in overwhelming compact size