Historically, the terms "X-ray microscope" and "X-ray Microscopy (XRM)" referred to imaging methods utilizing synchrotron radiation facilities (such as SPring-8) to observe biological samples containing moisture. These large-scale systems use optical elements like zone plates to focus X-rays, achieving high spatial resolution.
In recent years, the term is also applied to laboratory-based systems that do not use synchrotron radiation. These modern X-ray microscopes typically employ a micro-focus X-ray source to project a magnified image of an internal structure onto a detector. By using an extremely small focal spot, these systems achieve high geometric magnification and spatial resolution comparable to optical microscopes. Advanced models can offer magnification up to 1000x and resolution as fine as 0.2 μm, making them ideal for the non-destructive analysis of detailed internal structures.
