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Semiconductor Fabrication Equipment requires power supplies with exceptional precision and reliability. Matsusada Precision offers a comprehensive lineup of high-voltage and DC power supplies designed for every stage of the semiconductor manufacturing process, from wafer fabrication to inspection.

Our power supplies are engineered to operate stably in demanding cleanroom environments and are trusted by major equipment manufacturers worldwide. Whether for deposition, etching, ion implantation, or inspection systems, we provide solutions that meet the stringent requirements of modern semiconductor fabs.

For more details on specific semiconductor processes, please refer to the link below.

Semiconductor Solutions

Matsusada Precision supports the production of semiconductors, LCDs, OLED displays, and other advanced electronic devices with high-performance power management solutions.

Recommended products

R4G/R4GN series

R4G/R4GN series

Voltage Range
6 to 650 V
Current
0.1 to 10 A
Power
12 to 180 W
A Compact, High-Resolution
Linear DC Power Supply

High resolution, ultra-low noise, and digital interface

R4GT series

R4GT series

Voltage Range
6 to 36 V
Current
0.01 to 0.3 A
Power
0.1 to 7.2 W
Ultra-High-Resolution Linear DC Power Supply

Features various pulse/ramp functions and ultra-low noise

TB series

TB series

Voltage Range
35 to 1000 V
Current
1 to 108 A
Power
360 W, 720 W, 1080 W
Wide-Range Programmable
DC Power Supply

Features a variable-range output (Turbo function) and a compact design

REK/REKJ series

REK/REKJ series

Voltage Range
6 to 1500 V
Current
1.2 to 1200 A
Power
0.77 to 15 kW
Versatile, High-performance
DC power supply

A compact, high-power design featuring active Power Factor Correction (PFC) and universal input for versatile operation.

RE series

RE series

Voltage Range
10 to 650 V
Current
1.2 to 1200 A
Power
0.75 to 15 kW
A Programmable DC Power Supply Available in 147 Models

Low noise, high power, compact and high efficiency

PRT series

PRT series

Voltage Range
80 to 1500 V
Current
33 to 510 A
Power
5 to 15 kW
High Power Autoranging DC Power Supply

Features autoranging output and variable internal resistance simulation to suit various load characteristics.

AU series

AU series

Voltage Range
1 to 120 kV
Current
0.25 to 2200 mA
Power
30 to 2200 W
Rack Mount High-Voltage Power Supply

The AU series features a low-profile, lightweight design and is available in over 300 models. It supports remote control and monitoring, with a digital interface option.

ECA series

ECA series

Voltage Range
±1 to ±10 kV
Current
0.5 to 30 mA
Power
5 to 30 W
Power Supply for Electrostatic Chucks

Features fast response, high reliability, and long operational life.

EJC series

EJC series

Voltage Range
±1 to ±5 kV
Current
1.2 to 30 mA
Power
6 W, 30 W
for Electrostatic Chucks

Delivers fast response times with high reliability. Designed for long-term operation in industrial environments.

EPR series

EPR series

Voltage Range
1 to 30 kV
Current
1 to 150 mA
Power
30 to 150 W
Compact 150 W Benchtop
High Voltage Power Supply

The compact, lightweight design with universal input makes the EPR series ideal for versatile laboratory use.

AMPS series

AMPS series

Voltage Range
±0.6 to ±30 kV
Current
±0.02 to ±2 A
Power
0.4 to 1.2 kW
Ultra-high-speed High-voltage Amplifier

Ultra high slew rate 1200 V/µs, High-speed response of frequency bandwidth 100 kHz

AMJ series

AMJ series

Voltage Range
±0.5 to ±4 kV
Current
±10 to ±80 mA
Power
20 to 40 W
Compact and Fast Response
High voltage Amplifier

Offers a high-speed frequency response of up to 75 kHz and a DC bias function.