Discontinued
Micro Stages
- Piezo Stage
- Maximum stroke:
100µm - Resolution in nano order
- High speed response
PZS series is no longer available as we have stopped the production and sales this model in March 2022. Meanwhile, we support.
High speed response Micro Stages
Features and Benefits
- Resolution in nano order
- High speed response
- Applicable to closed-loop control
- Nonmagnetic materials are used
Applications
- Positioning of mask-wafer
- Interferometer
- Positioning of fiber
- Test of disc-drive
- Relevant equipment for biotechnology
- Relevant equipment for semiconductor
- Piezo applications
Models
| Models | Displacement * | Axis | Linearity | Capacitance | Resonant frequency | Sensor | Material | Treatment |
|---|---|---|---|---|---|---|---|---|
| PZS40 | 80 µ m | X | 0.1% | 1.8 µF | 1000 Hz | Strain Gauge | SUS | - |
| PZS80-1 | 100 µm | X | 0.1% | 3.4 µF | 500 Hz | Strain Gauge | AI | Black-Anodizing |
* Values for closed-loop control with our PZJ-0.12BS series
Specifications
Options
N: No displacement sensor.
(BNC): BNC connector for control cable.
How to Order
- When ordering, add Option No. in the following order by with or without displacement sensor, and connector to Model No.
- Example:
- PZS40N(BNC)
Extension cable is applicable (up to 4 meters)
If extension cables are required, please inform our sale staff its type and length of the cable as bellow.
- N (no sensor) and no option: PZ extension cable **(#)
- N (no sensor) but with a option: PZN extension cable **(#)
- **: not filled = both ends of control cable; LEMO/Filled LB = one end of control cable; BNC/Filled BB = both ends of control cable; BNC
- #: Fill digits of the cable length in meter.
How to Order
- Example:
-
- PZN ext. cable(4): both ends of the cable are LEMO Length is 4 meters.
- PZ ext. cableLB(2): one end of cable is BNC Length is 2 meters.
Dimensions
Download
![Piezoelectric products Selection Guide]()
-
Piezoelectric products Selection Guide
Date: 2023-11-14 rev.17
PDF (7,283 KB)
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![Piezoelectric products Selection Guide]()
-
Piezoelectric products Selection Guide
Date: 2023-11-14 rev.17
PDF (7,283 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
