Discontinued
Piezo Electric Micro Stages
- Piezo Stage
- Maximum stroke:
100 µm - Nano-scale resolution
- High speed response
Production and sales of the PZS series ended in March 2022. However, we continue to offer product support. Please contact us for details on maintenance or alternative models.
High Speed Response Micro Stages
Features and Benefits
- Nano-scale resolution
- High speed response
- Applicable to closed-loop control
- Constructed with non-magnetic materials
Applications
- Mask and wafer alignment
- Interferometer
- Positioning of fiber
- Test of disc-drive
- Biotechnology equipment
- Semiconductor manufacturing equipment
- Piezo applications
Models
| Models | Displacement * | Axis | Linearity | Capacitance | Resonant frequency | Sensor | Material | Treatment |
|---|---|---|---|---|---|---|---|---|
| PZS40 | 80 µm | X | 0.1% | 1.8 µF | 1000 Hz | Strain Gauge | SUS | - |
| PZS80-1 | 100 µm | X | 0.1% | 3.4 µF | 500 Hz | Strain Gauge | AI | Black-Anodizing |
* Values for closed-loop control with our PZJ-0.12BS series
Specifications
Options
N: No displacement sensor.
(BNC): BNC connector for the control cable.
How to Order
- When ordering, add Option No. in the following order with or without displacement sensor, and connector to Model No.
- Example:
- PZS40N(BNC)
Extension cables are available (up to 4 meters)
If extension cables are required, please inform our sales staff of the type and length of the cable as below.
- N (no sensor) and no option: PZ extension cable **(#)
- N (no sensor) but with an option: PZN extension cable **(#)
- **: not filled = both ends of control cable; LEMO/Filled LB = one end of control cable; BNC/Filled BB = both ends of control cable; BNC
- #: Fill digits of the cable length in meters.
How to Order
- Example:
-
- PZN ext. cable(4): both ends of the cable are LEMO Length is 4 meters.
- PZ ext. cableLB(2): one end of the cable is BNC Length is 2 meters.
Dimensions
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Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
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Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
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