PIEZOELECTRIC LINEAR ACTUATOR
- Four displacement sensors
- Nanometer-level positioning control
- Stroke range:
22µm to 132µm - Output force:
800N to 3,000N
High-Speed Piezoelectric Actuators with Nanometer-Scale Resolution
The PZA Series consists of linear actuators featuring a stacked piezoelectric element design. Equipped with integrated strain gauge sensors, these actuators enable high-precision displacement control suitable for closed-loop operation. The series offers superior accuracy compared to standard models. With 45 models available—combining three power ratings, five stroke lengths, and three tip variations—the PZA Series meets a wide range of application requirements. The durable metal housing ensures environmental resistance, while pairing with a compatible controller enables precise position control via a feedback loop.
FEATURES AND BENEFITS
- Integrated strain gauge sensors: Enables ultra-high-precision displacement control.
- Nanometer-scale resolution: Ideal for fine positioning applications.
- High-speed response: Optimized for dynamic operations.
- Closed-loop control support: Ensures stable and accurate positioning.
APPLICATIONS
- Semiconductor & Nanopositioning: Precision alignment in lithography, wafer handling, and nanometer-scale motion control.
- Optics & Photonics: Fine adjustment of lasers, lenses, mirrors, optical fibers, and high-precision optical metrology.
- Microscopy & Research Tools: Precise positioning in electron microscopes, scanning probe microscopes, and interferometry systems.
- Biomedical & Microfluidics: Micropump and nozzle actuation, fluid control, and micromanipulation of biological materials.
- Ultrasonics & Vibration Control: Ultrasonic generation for cleaning and medical devices, plus active vibration cancellation for sensitive equipment.
- Piezo applications
REFERENCE DATA
Example: PZ12-1 Response
Condition: Maximum rated voltage applied Hysteresis: 10% to 15%
Models
Top Pieces
Any one of the top pieces has to be selected essentially.
The shape of the top piece is selectable.
T: Threaded hole (Internal thread)
S:Threaded stud (External thread)
B: Ball tip adapter (Mounted on the threaded hole)
| PZA12 | PZA14 | PZA20 | ||
|---|---|---|---|---|
| Shapes | Thread hole | M3-3 * | M4-4 | M5-5 |
| Thread | M4-4 | M5-5 * | M8-7 * | |
| Ball | SR5 | SR5 | SR17 | |
* Standard configuration
Displacement values in parentheses ( ) indicate performance during closed-loop control using the PZJ- 0.12BS Series driver.
| Model | ΦF(outside diameter) | Case Length | Capaci-tance | Displacement |
|---|---|---|---|---|
| PZA12-1T | Φ0.47 inch(12 mm) | 1.26 inch(32 mm) | 1.6 μF | 22 µm(15 µm) |
| PZA12-1S | ||||
| PZA12-1B | ||||
| PZA12-2T | Φ0.47 inch(12 mm) | 1.97 inch(50 mm) | 3.2 μF | 44 µm(30 µm) |
| PZA12-2S | ||||
| PZA12-2B | ||||
| PZA12-3T | Φ0.47 inch(12 mm) | 2.68 inch(68 mm) | 4.8 μF | 66 µm(45 µm) |
| PZA12-3S | ||||
| PZA12-3B | ||||
| PZA12-4T | Φ0.47 inch(12 mm) | 3.39 inch(86 mm) | 6.4 μF | 88 µm(60 µm) |
| PZA12-4S | ||||
| PZA12-4B | ||||
| PZA12-6T | Φ0.47 inch(12 mm) | 4.8 inch(122 mm) | 9.6 μF | 132 µm(90 µm) |
| PZA12-6S | ||||
| PZA12-6B |
| Model | ΦF(outside diameter) | Case Length | Capaci-tance | Displacement |
|---|---|---|---|---|
| PZA14-1T | Φ0.55 inch(14 mm) | 1.46 inch(37 mm) | 1.6 μF | 22 µm(15 µm) |
| PZA14-1S | ||||
| PZA14-1B | ||||
| PZA14-2T | Φ0.55 inch(14 mm) | 2.17 inch(55 mm) | 3.2 μF | 44 µm(30 µm) |
| PZA14-2S | ||||
| PZA14-2B | ||||
| PZA14-3T | Φ0.55 inch(14 mm) | 2.87 inch(73 mm) | 4.8 μF | 66 µm(45 µm) |
| PZA14-3S | ||||
| PZA14-3B | ||||
| PZA14-4T | Φ0.55 inch(14 mm) | 3.58 inch(91 mm) | 6.4 μF | 88 µm(60 µm) |
| PZA14-4S | ||||
| PZA14-4B | ||||
| PZA14-6T | Φ0.55 inch(14 mm) | 5 inch(127 mm) | 9.6 μF | 132 µm(90 µm) |
| PZA14-6S | ||||
| PZA14-6B |
| Model | ΦF(outside diameter) | Case Length | Capaci-tance | Displacement |
|---|---|---|---|---|
| PZA20-1T | Φ0.78 inch(19.8 mm) | 1.85 inch(47 mm) | 6.5 μF | 22 µm(15 µm) |
| PZA20-1S | ||||
| PZA20-1B | ||||
| PZA20-2T | Φ0.78 inch(19.8 mm) | 2.56 inch(65 mm) | 13 μF | 44 µm(30 µm) |
| PZA20-2S | ||||
| PZA20-2B | ||||
| PZA20-3T | Φ0.78 inch(19.8 mm) | 3.27 inch(83 mm) | 19.5 μF | 66 µm(45 µm) |
| PZA20-3S | ||||
| PZA20-3B | ||||
| PZA20-4T | Φ0.78 inch(19.8 mm) | 3.98 inch(101 mm) | 26 μF | 88 µm(60 µm) |
| PZA20-4S | ||||
| PZA20-4B | ||||
| PZA20-6T | Φ0.78 inch(19.8 mm) | 5.39 inch(137 mm) | 39 μF | 132 µm(90 µm) |
| PZA20-6S | ||||
| PZA20-6B |
*1 Tolerance: ±0.05 mm, ±20% for capacitance.
Specifications
Options
- N
-
Without strain sensor (strain gauge).
- (BNC)
-
Changes the control cable connector to BNC.
How to Order
Please append the Option code to the Model number based on the top piece shape, sensor requirement, and connector type.
<Example> PZA12-1BN(BNC), PZA12-1TN, PZA12-1S(BNC)
Additional Accessories
- Extension cable
-
Extension cables up to 4 meters are available. Depending on whether the piezo actuator has a strain sensor, two types of extension cables are available. With a strain sensor, the set consists of a control cable and a sensor cable. Without a strain sensor, only the control cable is used. You can also change the control cable to BNC by specifying the connector. Cable length can be specified in 1-meter increments.
-
Please specify the cable type, connector configuration, and length when ordering.
Cable type
• PZ extension cable: with strain sensor (set of control cable and sensor cable)
• PZN extension cable: without strain sensor (control cable only) -
Connector type (control cable only)
• Not specified: LEMO socket - LEMO plug
• LB: LEMO socket - BNC plug (male)
• BB: BNC jack (female) - BNC plug (male)
-
Cable length
• (1): 1 meter
• (2): 2 meters
• (3): 3 meters
• (4): 4 meters
How to Order
When ordering, add specify the cable type, and connector specification (cable length) to Model No.
<Example>
PZ extension cable (4): With strain sensor cable, LEMO connectors on both ends, 4-meter length.
PZN extension cable LB (2): Without strain sensor cable, LEMO to BNC connector, 2-meter length.
Dimensions
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PZA series Datasheet
Date: 2025-10-24 rev 04
PDF (1,783 KB)
-
Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
Login Required
-
PZA series Datasheet
Date: 2025-10-24 rev 04
PDF (1,783 KB)
-
Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
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