PIEZOELECTRIC LINEAR ACTUATOR
- Four displacement sensors
- Nanometer-level positioning control
- Stroke range:
22µm to 132µm - Output force:
800N to 3,000N
HIGH SPEED RESPONSE PIEZO ACTUATOR WITH NANO ORDER RESOLUTION
The PZA series are linear actuators featuring a stacked piezo element design. Integrating four displacement sensor based on strain gauges, this series provides even higher precision displacement control, surpassing the PZ series. A total of 45 models are available, combining three power ratings, five stroke lengths, and three tip variations to meet a wide variety of application needs. The durable metal housing offers superior environmental resistance, and pairing with a controller (sold separately) enables simple and precise position control via a feedback loop.
FEATURES AND BENEFITS
- Four displacement sensors (strain gauges) enable ultra-high-precision displacement control.
(An option without displacement sensors is also available.) - Resolution in nano order
- High speed response
- Applicable to closed-loop control.
APPLICATIONS
- Semiconductor & Nanopositioning: Precision alignment in lithography, wafer handling, and nanometer-scale motion control.
- Optics & Photonics: Fine adjustment of lasers, lenses, mirrors, optical fibers, and high-precision optical metrology.
- Microscopy & Research Tools: Precise positioning in electron microscopes, scanning probe microscopes, and interferometry systems.
- Biomedical & Microfluidics: Micropump and nozzle actuation, fluid control, and micromanipulation of biological materials.
- Ultrasonics & Vibration Control: Ultrasonic generation for cleaning and medical devices, plus active vibration cancellation for sensitive equipment.
- Piezo applications
REFERENCE DATA
Case that max impressed voltage is loaded on PZ12-1
Hysteresis is 10% to 15 %
Models
Top Pieces
Any one of the top pieces has to be selected essentially.
The shape of the top piece is selectable.
T: Thread hole
S: Thread
B: Ball (adapter) [mounted o tapped screw on the top]
| PZA12 | PZA14 | PZA20 | ||
|---|---|---|---|---|
| Shapes | Thread hole | M3-3 * | M4-4 | M5-5 |
| Thread | M4-4 | M5-5 * | M8-7 * | |
| Ball | SR5 | SR5 | SR17 | |
* Standard
Displacement in ( ) are values for closed-loop control with our PZJ- 0.12BS series.
| Model | ΦF(outside diameter) | Case Length | Capaci-tance | Displacement |
|---|---|---|---|---|
| PZA12-1T | Φ0.47 inch(12 mm) | 1.26 inch(32 mm) | 1.6 μF | 22 µm(15 µm) |
| PZA12-1S | ||||
| PZA12-1B | ||||
| PZA12-2T | Φ0.47 inch(12 mm) | 1.97 inch(50 mm) | 3.2 μF | 44 µm(30 µm) |
| PZA12-2S | ||||
| PZA12-2B | ||||
| PZA12-3T | Φ0.47 inch(12 mm) | 2.68 inch(68 mm) | 4.8 μF | 66 µm(45 µm) |
| PZA12-3S | ||||
| PZA12-3B | ||||
| PZA12-4T | Φ0.47 inch(12 mm) | 3.39 inch(86 mm) | 6.4 μF | 88 µm(60 µm) |
| PZA12-4S | ||||
| PZA12-4B | ||||
| PZA12-6T | Φ0.47 inch(12 mm) | 4.8 inch(122 mm) | 9.6 μF | 132 µm(90 µm) |
| PZA12-6S | ||||
| PZA12-6B |
| Model | ΦF(outside diameter) | Case Length | Capaci-tance | Displacement |
|---|---|---|---|---|
| PZA14-1T | Φ0.55 inch(14 mm) | 1.46 inch(37 mm) | 1.6 μF | 22 µm(15 µm) |
| PZA14-1S | ||||
| PZA14-1B | ||||
| PZA14-2T | Φ0.55 inch(14 mm) | 2.17 inch(55 mm) | 3.2 μF | 44 µm(30 µm) |
| PZA14-2S | ||||
| PZA14-2B | ||||
| PZA14-3T | Φ0.55 inch(14 mm) | 2.87 inch(73 mm) | 4.8 μF | 66 µm(45 µm) |
| PZA14-3S | ||||
| PZA14-3B | ||||
| PZA14-4T | Φ0.55 inch(14 mm) | 3.58 inch(91 mm) | 6.4 μF | 88 µm(60 µm) |
| PZA14-4S | ||||
| PZA14-4B | ||||
| PZA14-6T | Φ0.55 inch(14 mm) | 5 inch(127 mm) | 9.6 μF | 132 µm(90 µm) |
| PZA14-6S | ||||
| PZA14-6B |
| Model | ΦF(outside diameter) | Case Length | Capaci-tance | Displacement |
|---|---|---|---|---|
| PZA20-1T | Φ0.78 inch(19.8 mm) | 1.85 inch(47 mm) | 6.5 μF | 22 µm(15 µm) |
| PZA20-1S | ||||
| PZA20-1B | ||||
| PZA20-2T | Φ0.78 inch(19.8 mm) | 2.56 inch(65 mm) | 13 μF | 44 µm(30 µm) |
| PZA20-2S | ||||
| PZA20-2B | ||||
| PZA20-3T | Φ0.78 inch(19.8 mm) | 3.27 inch(83 mm) | 19.5 μF | 66 µm(45 µm) |
| PZA20-3S | ||||
| PZA20-3B | ||||
| PZA20-4T | Φ0.78 inch(19.8 mm) | 3.98 inch(101 mm) | 26 μF | 88 µm(60 µm) |
| PZA20-4S | ||||
| PZA20-4B | ||||
| PZA20-6T | Φ0.78 inch(19.8 mm) | 5.39 inch(137 mm) | 39 μF | 132 µm(90 µm) |
| PZA20-6S | ||||
| PZA20-6B |
*1 Tolerance: ±0.05 mm, ±20% for capacitance.
Specifications
Options
- N
-
No strain sensor (strain gauge).
- (BNC)
-
BNC connector for control cable.
How to Order
When ordering, add Option No. in the following order by the shape of the top piece, with or without strain sensor (strain gauge), and connector to Model No.
<Example> PZA12-1BN(BNC), PZA12-1TN, PZA12-1S(BNC)
Additional Accessories
- Extension cable
-
Extension cables up to 4 meters are available. Depending on whether the piezo actuator has a strain sensor, two types of extension cables are available. With a strain sensor, the set consists of a control cable and a sensor cable. Without a strain sensor, only the control cable is used. You can also change the control cable to BNC by specifying the connector. Cable length can be specified in 1-meter increments.
-
Cable type
• PZ extension cable: with strain sensor (set of control cable and sensor cable)
• PZN extension cable: without strain sensor (control cable only) -
Connector type (control cable only)
• Not specified: LEMO socket - LEMO plug
• LB: LEMO socket - BNC plug (male)
• BB: BNC jack (female) - BNC plug (male)
-
Cable length
• (1): 1 meter
• (2): 2 meters
• (3): 3 meters
• (4): 4 meters
How to Order
When ordering, add specify the cable type, and connector specification (cable length) to Model No.
<Example> PZ extension cable (4): with strain sensor cable, LEMO connectors at both ends, cable length 4-meters
PZN extension cable LB (2): without strain sensor cable, BNC connector on one side, cable length 2-meters
Dimensions
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PZA series Datasheet
Date: 2025-10-24 rev 04
PDF (1,783 KB)
-
Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
Login Required
-
PZA series Datasheet
Date: 2025-10-24 rev 04
PDF (1,783 KB)
-
Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
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