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  • Image of the PZ Series
  • Image of the PZ Series

PIEZOELECTRIC LINEAR ACTUATOR

  • Dual displacement sensors
  • High-precision positioning control
  • Stroke range:
    22µm to 110µm
  • Output force:
    800N to 19,000N

OPTIMIZED FOR HIGH-PRECISION POSITIONING CONTROL

The PZ series of linear actuators features dual strain gauge displacement sensors to deliver high-precision control. With a diverse lineup of 40 models offering various stroke lengths and force ratings, you can select the optimal unit for any application. The robust metal package ensures excellent environmental resistance. When combined with a compatible piezo controller (sold separately), the PZ series allows for easy implementation of precise positioning systems.

FEATURES AND BENEFITS

  • Dual displacement sensors (strain gauges) enable highly accurate closed-loop control.
    (Models without sensors are also available.)
  • Robust metallic package provides excellent environmental resistance.
  • Wide selection of 40 models available with different stroke lengths and force ratings.

APPLICATIONS

  • Semiconductor & Nanopositioning: Precision alignment in lithography, wafer handling, and nanometer-scale motion control.
  • Optics & Photonics: Fine adjustment of lasers, lenses, mirrors, optical fibers, and high-precision optical metrology.
  • Microscopy & Research Tools: Precise positioning in electron microscopes, scanning probe microscopes, and interferometry systems.
  • Biomedical & Microfluidics: Micropump and nozzle actuation, fluid control, and micromanipulation of biological materials.
  • Ultrasonics & Vibration Control: Ultrasonic generation for cleaning and medical devices, plus active vibration cancellation for sensitive equipment.
  • Piezo applications

REFERENCE DATA

Displacement response of the PZ12-32 at maximum applied voltage.

Hysteresis is 10% to 15%

Piezo Actuator PZ, reference data | Matsusada Precision

Models

Values in parentheses ( ) indicate displacement during closed-loop control with the PZJ- 0.12BS series.

PZ12
Model Case Length Capacitance Displacement ΦF
(outside diameter)*1
PZ12-32 32 mm 1.4 µF 22 µm(15 µm) 12 mm
PZ12-52 52 mm 2.8 µF 44 µm(30 µm)
PZ12-72 72 mm 4.2 µF 66 µm(45 µm)
PZ12-92 92 mm 5.6 µF 88 µm(60 µm)
PZ12-112 112 mm 7 µF 110 µm(75 µm)
PZ20
Model Case Length Capacitance Displacement ΦF
(outside diameter)*1
PZ20-45 45 mm 5.4 µF 22 µm(15 µm) 20 mm
PZ20-65 65 mm 10.8 µF 44 µm(30 µm)
PZ20-85 85 mm 16.2 µF 66 µm(45 µm)
PZ20-105 105 mm 21.6 µF 88 µm(60 µm)
PZ20-125 125 mm 27.0 µF 110 µm(75 µm)
PZ28
Model Case Length Capacitance Displacement ΦF
(outside diameter)*1
PZ28-45 45 mm 11 µF 22 µm(15 µm) 28 mm
PZ28-65 65 mm 22 µF 44 µm(30 µm)
PZ28-85 85 mm 33 µF 66 µm(45 µm)
PZ28-105 105 mm 44 µF 88 µm(60 µm)
PZ28-125 125 mm 55 µF 110 µm(75 µm)
PZ45
Model Case Length Capacitance Displacement ΦF
(outside diameter)*1
PZ45-45 45 mm 30 µF 22 µm(15 µm) 45 mm
PZ45-65 65 mm 60 µF 44 µm(30 µm)
PZ45-85 85 mm 90 µF 66 µm(45 µm)
PZ45-105 105 mm 120 µF 88 µm(60 µm)
PZ45-125 125 mm 150 µF 110 µm(75 µm)

*1 Tolerance: ±0.05 mm, ±20% for capacitance.

Specifications

For details, download the datasheet below.

Options

B

Ball tip adapter (Mounted on the threaded hole)

Piezo Actuator PZ option
Shape PZ12 PZ20 PZ28 PZ45
K SR5 SR17 SR25 SR25
N

Without strain sensor (strain gauge).

(BNC)

Changes the control cable connector to BNC.

How to Order

When ordering, add Option No. in the following order by the shape of the top piece, with or without strain sensor (strain gauge), and connector to Model No.
<Example> PZ12-32BN(BNC)

Additional accessory

Extension cable

Extension cables up to 4 meters are available. Depending on whether the piezo actuator has a strain sensor, two types of extension cables are available. With a strain sensor, the set consists of a control cable and a sensor cable. Without a strain sensor, only the control cable is used. You can also change the control cable to BNC by specifying the connector. Cable length can be specified in 1-meter increments.

Cable type
• PZ extension cable: with strain sensor (set of control cable and sensor cable)
• PZN extension cable: without strain sensor (control cable only)

Connector type (control cable only)
• Not specified: LEMO socket - LEMO plug
• LB: LEMO socket - BNC plug (male)
• BB: BNC jack (female) - BNC plug (male)

Cable length
• (1): 1 meter
• (2): 2 meters
• (3): 3 meters
• (4): 4 meters

How to Order

When ordering, add specify the cable type, and connector specification (cable length) to Model No.
<Example> PZ extension cable (4): with strain sensor cable, LEMO connectors at both ends, cable length 4-meters
PZN extension cable LB (2): without strain sensor cable, BNC connector on one side, cable length 2-meters

Dimensions

For details, download the datasheet below.

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