PIEZOELECTRIC LINEAR ACTUATOR
- Dual displacement sensors
- High-precision positioning control
- Stroke range:
22µm to 110µm - Output force:
800N to 19,000N
AVAILABLE FOR HIGH-PRECISION POSITIONING CONTROL
The PZ series of piezo linear actuators is equipped with two displacement sensor based on strain gauges to deliver high-precision displacement control. With an extensive lineup of 40 models featuring various strokes and power ratings, you can select the optimal model for any application. The robust metal package ensures excellent environmental resistance, and when combined with a piezo controller (sold separately), allows for easy implementation of precise positioning control.
FEATURES AND BENEFITS
- Dual displacement sensors (strain gauges) enable highly accurate displacement control.
(An option without displacement sensors is also available.) - Excellent environmentally resistant with metallic package
- Wide 40 models with different strokes and forces
APPLICATIONS
- Semiconductor & Nanopositioning: Precision alignment in lithography, wafer handling, and nanometer-scale motion control.
- Optics & Photonics: Fine adjustment of lasers, lenses, mirrors, optical fibers, and high-precision optical metrology.
- Microscopy & Research Tools: Precise positioning in electron microscopes, scanning probe microscopes, and interferometry systems.
- Biomedical & Microfluidics: Micropump and nozzle actuation, fluid control, and micromanipulation of biological materials.
- Ultrasonics & Vibration Control: Ultrasonic generation for cleaning and medical devices, plus active vibration cancellation for sensitive equipment.
- Piezo applications
REFERENCE DATA
Case that max. impressed voltage is loaded on PZ12-32.
Hysteresis is 10% to 15%
Models
Displacement in ( ) are values for closed-loop control with our PZJ- 0.12BS series.
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ12-32 | 32 mm | 1.4 µF | 22 µm(15 µm) | 12 mm |
| PZ12-52 | 52 mm | 2.8 µF | 44 µm(30 µm) | |
| PZ12-72 | 72 mm | 4.2 µF | 66 µm(45 µm) | |
| PZ12-92 | 92 mm | 5.6 µF | 88 µm(60 µm) | |
| PZ12-112 | 112 mm | 7 µF | 110 µm(75 µm) |
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ20-45 | 45 mm | 5.4 µF | 22 µm(15 µm) | 20 mm |
| PZ20-65 | 65 mm | 10.8 µF | 44 µm(30 µm) | |
| PZ20-85 | 85 mm | 16.2 µF | 66 µm(45 µm) | |
| PZ20-105 | 105 mm | 21.6 µF | 88 µm(60 µm) | |
| PZ20-125 | 125 mm | 27.0 µF | 110 µm(75 µm) |
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ28-45 | 45 mm | 11 µF | 22 µm(15 µm) | 28 mm |
| PZ28-65 | 65 mm | 22 µF | 44 µm(30 µm) | |
| PZ28-85 | 85 mm | 33 µF | 66 µm(45 µm) | |
| PZ28-105 | 105 mm | 44 µF | 88 µm(60 µm) | |
| PZ28-125 | 125 mm | 55 µF | 110 µm(75 µm) |
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ45-45 | 45 mm | 30 µF | 22 µm(15 µm) | 45 mm |
| PZ45-65 | 65 mm | 60 µF | 44 µm(30 µm) | |
| PZ45-85 | 85 mm | 90 µF | 66 µm(45 µm) | |
| PZ45-105 | 105 mm | 120 µF | 88 µm(60 µm) | |
| PZ45-125 | 125 mm | 150 µF | 110 µm(75 µm) |
*1 Tolerance: ±0.05 mm, ±20% for capacitance.
Specifications
Options
- B
-
Ball "Adapter" (mounted on tapped screw on the top)
Shape PZ12 PZ20 PZ28 PZ45 K SR5 SR17 SR25 SR25
- N
-
No strain sensor (strain gauge).
- (BNC)
-
connector for control cable.
How to Order
When ordering, add Option No. in the following order by the shape of the top piece, with or without strain sensor (strain gauge), and connector to Model No.
<Example> PZ12-32BN(BNC)
Additional accessory
- Extension cable
-
Extension cables up to 4 meters are available. Depending on whether the piezo actuator has a strain sensor, two types of extension cables are available. With a strain sensor, the set consists of a control cable and a sensor cable. Without a strain sensor, only the control cable is used. You can also change the control cable to BNC by specifying the connector. Cable length can be specified in 1-meter increments.
-
Cable type
• PZ extension cable: with strain sensor (set of control cable and sensor cable)
• PZN extension cable: without strain sensor (control cable only) -
Connector type (control cable only)
• Not specified: LEMO socket - LEMO plug
• LB: LEMO socket - BNC plug (male)
• BB: BNC jack (female) - BNC plug (male) -
Cable length
• (1): 1 meter
• (2): 2 meters
• (3): 3 meters
• (4): 4 meters
How to Order
When ordering, add specify the cable type, and connector specification (cable length) to Model No.
<Example> PZ extension cable (4): with strain sensor cable, LEMO connectors at both ends, cable length 4-meters
PZN extension cable LB (2): without strain sensor cable, BNC connector on one side, cable length 2-meters
Dimensions
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-
PZ series Datasheet
Date: 2025-10-24 rev 04
PDF (1,783 KB)
-
Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
Login Required
-
PZ series Datasheet
Date: 2025-10-24 rev 04
PDF (1,783 KB)
-
Piezoelectric products Selection Guide
Date: 2025-12-05 rev 25
PDF (4,427 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
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