Electrostatic Chuck Power Supply Reversible Output Module
High Voltage Power Supply for ESC
ELECTROSTATIC CHUCK POWER SUPPLY REVERSIBLE MODULE
The MEC series is a reversible high-voltage power supply module designed specifically for electrostatic chuck (E-Chuck) applications. Its compact form factor ensures easy integration into industrial systems. The polarity reversing function facilitates smooth wafer release. With a broad lineup ranging from ±1 kV to ±10 kV, the series supports both Johnsen-Rahbek and Coulomb type chucks.
FEATURES AND BENEFITS
- Optimized for electrostatic chuck (E-Chuck) applications
- Reversible output polarity for smooth wafer release
- Remote control of output voltage and polarity switching
- Equipped with output voltage and current monitors
MAIN APPLICATION
Models
Specifications
- Input voltage
- +24 Vdc ±1 Vdc (23 to 25 Vdc)
- Output Voltage Control
- External control voltage 0 to 5 V
For details, download the datasheet below.
Waveform Example
Output Voltage Setting Characteristics
Options
- -L(1m)
-
High-voltage output cable (1 m)
- -L(3m)
-
High Voltage output cable 3 meters
- -L(5m)
-
High Voltage output cable 5 meters
How to Order
When ordering, add the Option No. to the Model No. in alphabetical order.
Example: MEC-1R10-L(1m)
Diagram
Dimensions
185 x 152 x 43mm (7.28" x 5.98" x 1.69")
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
