Electrostatic Chuck Power Supply Reversible Output Module
High Voltage Power Supply
ELECTROSTATIC CHUCK POWER SUPPLY REVERSIBLE MODULE
MEC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. It is a compact module type and easy to integrate into a system. Smooth wafer release is achieved by reversing the polarity. Compatible with both Johnsen-Rahbek and Coulomb types due to its wide product range of ±1 kV to ±10 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) applications
- Smooth release of the wafer with polarity reverse function
- Polarity change and output voltage control with remote signal
- Output Voltage and Current monitor
MAIN APPLICATION
Models
Specifications
- Input voltage
- +24 Vdc ±1 Vdc (23 to 25 Vdc)
- Output Voltage Control
- External control voltage 0 to 5 V
For details, download the datasheet below.
Waveform Example
Output Voltage Setting Characteristics
Options
- -L(1m)
-
High Voltage output cable 1 meter
- -L(3m)
-
High Voltage output cable 3 meters
- -L(5m)
-
High Voltage output cable 5 meters
How to Order
When ordering, add the Option No. to the Model No. in alphabetical order.
Example: MEC-1R10-L(1m)
Diagram
Dimensions
185 x 152 x 43mm (7.28" x 5.98" x 1.69")
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
