NEW
ELECTROSTATIC CHUCK POWER SUPPLY
Wafer Sensor adopted
- Max Voltage：±0.5 to ±7.5 kV
- Max Current: 1 to 20mA
- Dual-channel independent output
- Compact half-rack size design
Two channels, reversible, floating, programmable high voltage power supply for electrostatic chuck drivers.
HECD series is a dual-channel, reversible, floating, programmable high voltage power supply for electrostatic chuck drivers. In addition to the polarity switching and forced grounding, the series offers a wafer monitoring system to satisfy wafer detection needs. Furthermore, with the wide range of voltages, this series can support both coulombic and Johnsen-Rahbek electrostatic chucks.
FEATURES AND BENEFITS
- Half rack size compact design
- Polarity reverse enabling increased throughput with quick dechucking
- Reliable chucking and releasing status detection via wafer sensor
- Fast response achieved through amplifier architecture design, ensuring high reliability and long lifespan due to 'non-relay polarity reversal' design.
- "Optional independent control for dual channels" and "Optional center-tap voltage setting" for various chuck/dechuck operations
- Digital interface with LAN, USB, RS-232C, or Ether CAT (option）
- Built-in 13.56 MHz RF filter
- Selectable models for wafer size and your applications
- OEM available (4-ch, 6-ch, digital communication, another output power)
APPLICATIONS
- Electrostatic Chuck (E-Chuck, ESC)
- Semiconductor Fabrication Equipment
- Photolithography
- Chemical vapor Deposition (CVD)
- Plasma Enhanced CVD (PECVD)
- Semiconductor wafer handling
- Flat panel handling
- Dry etching
- Plasma etching
- Reactive-ion etching (RIE)
Models
| Model | Output | Output Response speed [typical] (-90%⇔+90%*2) |
|
|---|---|---|---|
| Voltage Max*1 (each channel) |
Current (each channel) |
||
| HECD-0.5B20×2 | +0.5kV, -0.5kV | 20 mA | 10 ms |
| HECD-1B10×2 | +1kV, -1kV | 10 mA | 10 ms |
| HECD-1.5B6×2 | +1.5kV, -1.5kV | 6 mA | 15 ms |
| HECD-2B5×2 | +2kV, -2kV | 5 mA | 20 ms |
| HECD-4B1×2 | +4kV, -4kV | 1 mA | 40 ms |
| HECD-4B2.5×2 | +4kV, -4kV | 2.5 mA | 40 ms |
| HECD-5B2×2 | +5kV, -5kV | 2 mA | 60 ms |
| HECD-7.5B1.2×2 | +7.5kV, -7.5kV | 1.2 mA | 90 ms |
- Include center tap voltage and bias voltage.
- Typical value at operation with no load.
- Discontinued Products
-
Sales of the following models ended on March 2022. We continue to support the products.
Model Output Successor Voltage Current HECD-0.5B10×2 +0.5kV, -0.5kV 10 mA HECD-0.5B20×2 HECD-1B3×2 +1kV, -1kV 3 mA HECD-1B10×2 HECD-1.5B2×2 +1.5kV, -1.5kV 2 mA HECD-1.5B6×2 HECD-2B3×2 +2kV, -2kV 3 mA HECD-2B5×2
Specification
- Input voltage
- 24 Vdc ±5% (22.8 to 25.2 Vdc)
- Output voltage control
-
[Local] Setting knob on the front panel
[Analog remote] External control voltage -10 to +10 V
[Digital remote] Command
For details, download the datasheet below.
CHARACTERISTIC OF OUTPUT VOLTAGE SETTING
EXAMPLE OF WAVEFORM
Options
- -LCm
-
Additional high-sensitivity current monitor (each Ch)
0 to +10 V / −1/100 of rated output current to +1/100 of rated output current
- -LCt
-
Center tap bias
The bias setting range is from 0 to ± rated voltage.
However, the maximum output voltage remains the same as the rated voltage.
- -LEc
-
Ether CAT interface
(LAN, USB, or RS-232C is unavailable.)
- -LSep
-
Two-channel independent controls
- -L(AC)
-
AC 100 V to 240 V, 1 Øinput
- -L(7m)
-
Output High Voltage cable 7meters x 3
(2pcs when -LCt or -LSep is selected)
- -LCt and -LSep can not select together.
- -LCt and -LSep have no center tap terminal.
How to Order
To order, add Option No. to Model No. in alphabetic order followed by cable No.
Example: HECD-4B1×2-LSep(AC)(7m)
ACCESSORYS
|
Standard 0.5 kV to 5 kV model |
CN-SHV-HVPP(5) (with SHV connector on both end) |
 |
5 meters *When -L(7m) option is selected, CN-SHV-HVPP(7) is applied. |
|---|---|---|---|
|
Standard 7.5 kV model |
CN-SHV7.5-HVPP(5) (with SHV connector on both end) |
|
5 meters |
Dimensions
Download
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-
HECD series Datasheet
Date: 2025-08-06 rev 13
PDF (3,239 KB)
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
HECD series Instruction Manual
Date: 2024-12-02 rev 0.9
PDF (1,867 KB)
-
HECD series Basic Instruction Manual (Both Japanese and English)
Date: 2024-10-7 rev 0.0
PDF (800 KB)
Login Required
-
HECD series Datasheet
Date: 2025-08-06 rev 13
PDF (3,239 KB)
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
HECD series Instruction Manual
Date: 2024-12-02 rev 0.9
PDF (1,867 KB)
-
HECD series Basic Instruction Manual (Both Japanese and English)
Date: 2024-10-7 rev 0.0
PDF (800 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
