• EC series
  • EC series

EC series

Electrostatic chuck power supply

-Dual output rack mount

  • Max Voltage: ±1kV to ±10kV
  • Max Current: 20mA to 200mA
  • Max Power: 200W
  • Dual output
  • Reversible type

2ch output, Rack mount Reversible type ±1 kV to ±10kV/200W

EC series is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for unipolar systems (2ch) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck application
  • It has 2 output channels and suitable for bipolar system with just 1 unit
  • Reversible output
  • Smooth release of wafer with polarity reverse function
  • Compact and high power

Models

Models Output
Voltage [kV]
(each channel)
Current [mA]
(each channel)
EC-1R200 x 2 0 to ±1 200
EC-3R67 x 2 0 to ±3 67
EC-5R40 x 2 0 to ±5 40
EC-6R33 x 2 ±6 33
EC-10R20 x 2 ±10 20

Specifications

For details, download the datasheet below.

Options

-LRy: Output relay

Function to separate PS and load electrically by remote control

-LRf(13.56M): RF filter 13.56 MHz

-LRf(500K): RF filter 500 kHz

-L(220V): 200 Vac to 240 Vac single phase input

-L(230V): 210 Vac to 250 Vac single phase input

-L(7m): HV output cable 7 m length x 2

Note:
Wide range of filter frequency is available optionally. Please consult to sales staff.

How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.
Example:
EC-1R200x2-LRf(13.56M)Ry(200V)(7m)

Dimensions

For details, download the datasheet below.

Cable

Input/Output cable (Accessories)

Input cable

115 V input
CABLE TYPE 1
with 3-pin plug
  • CABLE TYPE 1 Power Input End
  • CABLE TYPE 1 Input Plug
-L(220V)/-L(230) option
CABLE TYPE 3
Flying lead
  • CABLE TYPE 3 Power Input End
  • CABLE TYPE 3 Input Plug

Output cable

1 kV to 5 kV models
CN-BNC-HVPP(5) *
HV-BNC connector on both end
  • CN-BNC-HVPP(5)
10 kV models
CN-15-MHVP(5) *
Flying lead
  • CN-15-MHVP(5)

* Standard is (5). It will be "(7)" when selected -L(7m) option.

Download

The account registration is necessary for downloading

In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.

Please click here if you are not registered yet to our site.

Membership Registration (Free)

Please click here if you are already registered to our site.

Log in

Information on related articles in Technical Knowledge

Electrostatic Chuck Power Supplies

Search for related to Electrostatic Chuck Power Supplies