EC series
Electrostatic chuck power supply
-Dual output rack mount
- Max Voltage: ±1kV to ±10kV
- Max Current: 20mA to 200mA
- Max Power: 200W
- Dual output
- Reversible type
2ch output, Rack mount Reversible type ±1 kV to ±10kV/200W
EC series is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for unipolar systems (2ch) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
Features and Benefits
- Specially designed for Electrostatic Chuck application
- It has 2 output channels and suitable for bipolar system with just 1 unit
- Reversible output
- Smooth release of wafer with polarity reverse function
- Compact and high power
Models
| Models | Output | |
|---|---|---|
| Voltage [kV] (each channel) |
Current [mA] (each channel) |
|
| EC-1R200 x 2 | 0 to ±1 | 200 |
| EC-3R67 x 2 | 0 to ±3 | 67 |
| EC-5R40 x 2 | 0 to ±5 | 40 |
| EC-6R33 x 2 | ±6 | 33 |
| EC-10R20 x 2 | ±10 | 20 |
Specifications
Options
-LRy: Output relay
Function to separate PS and load electrically by remote control
-LRf(13.56M): RF filter 13.56 MHz
-LRf(500k): RF filter 500 kHz
-L(220V): 200 Vac to 240 Vac single phase input
-L(230V): 210 Vac to 250 Vac single phase input
-L(7m): HV output cable 7 m length x 2
How to Order
- When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.
-
- Example:
- EC-1R200x2-LRf(13.56M)Ry(200V)(7m)
Dimensions
Cable
Input/Output cable (Accessories)
Input cable
- 115 V input
- CABLE TYPE 1
- with 3-pin plug
-
- -L(220V)/-L(230) option
- CABLE TYPE 3
- Flying lead
-
Output cable
- 1 kV to 5 kV models
- CN-BNC-HVPP(5) *
- HV-BNC connector on both end
-
- 10 kV models
- CN-15-MHVP(5) *
- Flying lead
-
* Standard is (5). It will be "(7)" when selected -L(7m) option.
Download
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2021-03-05 rev. 07
PDF (3,686 KB)
-
EC series Instruction Manual
Date: 2021-02-10 rev. 0.6
PDF (588 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2021-03-05 rev. 07
PDF (3,686 KB)
-
EC series Instruction Manual
Date: 2021-02-10 rev. 0.6
PDF (588 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.