Electrostatic chuck power supplies
- Dual output rack mount
2ch output, Rack mount Reversible type ±1 kV to ±10 kV/200 W
EC series are a high voltage power supplies developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems (2ch) or bi-polar systems. Correspond to both Johnson-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
- Specially designed for Electrostatic Chuck application
- It has 2 output channels and suitable for bi-polar system with just 1 unit
- Reversible output
- Smooth release of wafer with polarity reverse function
- Compact and high power
Example of waveform
Example of forced discharge • Output relay
Output relay : function to separate PS and load electrically by remote control
RF filter : 13.56MHz
RF filter : 500kHz
Protective cover : For POWER switch and HV switch
200VAC to 240VAC single phase input
210VAC to 250VAC single phase input
HV output cable 7m length (2)
*Wide range filter frequency is available optionally.
Please consult to sales staff.
How to OrderWhen ordering, suffix the above option mark to the model number.
(Alphabetical, input voltage and cable length order)
AC Input cable
CABLE TYPE 1
with 3-pin plugStandard（115V input）
CABLE TYPE 3
（Flying lead）-L(220V)/-L(230) option
（HV-BNC connector on both end）1kV to 5kV models
（Flying lead）6kV and 10kV models
*Standard is 5. It will be "7" when selected -L(7m) option.
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EC series Datasheet
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