• EC series | Electrostatic Chuck power supply Rackmount  | Matsusada Precision
  • EC series | Electrostatic Chuck power supply Rackmount  | Matsusada Precision

Electrostatic chuck power supply

-Dual output rack mount

  • Max Voltage: ±1kV to ±10kV
  • Max Current: 20mA to 200mA
  • Max Power: 200W
  • Dual output
  • Reversible type

2 channel output, Rackmount Reversible type ±1 kV to ±10kV/200W

EC series is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of the wafer is also possible by reversing the polarity. This electrostatic chuck power supply is a convenient power supply suitable for unipolar systems (2channel) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

Features and Benefits

  • Specially designed for Electrostatic Chuck application
  • It has 2 output channels and suitable for bipolar system with just 1 unit
  • Reversible output
  • Smooth release of wafer with polarity reverse function
  • Compact and high power

Main application


Models Output
Voltage [kV]
(each channel)
Current [mA]
(each channel)
EC-1R200 x 2 0 to ±1 kV 200 mA
EC-3R67 x 2 0 to ±3 kV 67 mA
EC-5R40 x 2 0 to ±5 kV 40 mA
EC-6R33 x 2 0 to ±6 kV 33 mA
EC-10R20 x 2 0 to ±10 kV 20 mA


For details, download the datasheet below.


-LRy: Output relay

Function to separate PS and load electrically by remote control

-LRf(13.56M): RF filter 13.56 MHz

-LRf(500k): RF filter 500 kHz

-L(220V): 200 Vac to 240 Vac single phase input

-L(230V): 210 Vac to 250 Vac single phase input

-L(7m): High-voltage output cable 7 meters length x 2

Wide range of filter frequency is available optionally. Please consult to sales staff.

How to Order

When ordering, add Option No. to Model No. in alphabetical, order followed by numerical, and the cable length.


Input/Output cable (Accessories)

Input cable

115 V input
with 3-pin plug
  • CABLE TYPE 1 Power Input End
  • CABLE TYPE 1 Input Plug
-L(220V)/-L(230) option
Flying lead
  • CABLE TYPE 3 Power Input End
  • CABLE TYPE 3 Input Plug

High voltage Output cable

1 kV to 5 kV models
HV-BNC connector on both end
  • CN-BNC-HVPP(5)
10 kV models
CN-15-MHVP(5) *
Flying lead
  • CN-15-MHVP(5)

* Standard is (5). It will be "(7)" when selected -L(7m) option.


For details, download the datasheet below.


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