Electrostatic chuck power supply
Compact and high power
- ±1kV to ±10kV
- 200W
- Dual output
- Reversible type
2 channel output, Rack-mount Reversible type ±1 kV to ±10kV/200W
EC series is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of the wafer is also possible by reversing the polarity. This electrostatic chuck power supply is a convenient power supply suitable for unipolar systems (2channel) or bipolar systems. Correspond to both Johnsen-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
Features and Benefits
- Specially designed for Electrostatic Chuck application
- It has 2 output channels and suitable for bipolar system with just 1 unit
- Reversible output
- Smooth release of wafer with polarity reverse function
- Compact and high power
Main application
Models
| Models | Output | |
|---|---|---|
| Voltage [kV] (each channel) |
Current [mA] (each channel) |
|
| EC-1R200 x 2 | 0 to ±1 kV | 200 mA |
| EC-3R67 x 2 | 0 to ±3 kV | 67 mA |
| EC-5R40 x 2 | 0 to ±5 kV | 40 mA |
| EC-6R33 x 2 | 0 to ±6 kV | 33 mA |
| EC-10R20 x 2 | 0 to ±10 kV | 20 mA |
Specifications
For details, download the datasheet below.
Example of waveform
Character of output voltage setting
Options
- -LRf(500k)
-
RF filter: 500 kHz *
- -LRf(13.56M)
-
RF filter: 13.56 MHz *
- -LRy
-
Output relay: Function to separate PS and load electrically by remote control
- -L(220V)
-
200 Vac to 240 Vac single phase input
- -L(230V)
-
210 Vac to 250 Vac single phase input
- -L(7m)
-
High Voltage output cable 7 m length: 2
Note: “*” cannot be selected together. Need to be selected either one.
Wide range filter frequency is available optionally. Please consult to sales staff.
How to Order
When ordering, add Option No. to Model No. in alphabetical, the order followed by numerical, and the cable length.
Example: EC-1R200x2-LRf(13.56M)Ry(200V)(7m)
Accessories
| Standard 115 V input |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|---|---|---|---|---|
| Standard -L(220V)/-L(230V) option |
CABLE TYPE3 | |
 |
250 V / 10 A | 2.5 meters Fixed length |
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
Standard is “5 meters”. |
|---|---|---|---|
| Standard [6 kV and 10 kV models] |
CN-15-MHVP(5)* |
 Flying lead |
Standard is “5 meters”. |
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
EC series Instruction Manual
Date: 2021-02-10 rev. 0.6
PDF (588 KB)
The account registration is necessary for downloading
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
EC series Instruction Manual
Date: 2021-02-10 rev. 0.6
PDF (588 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
