• EC Series
  • EC Series

EC Series

Electrostatic chuck power supplies

- Dual output rack mount

2ch output, Rack mount Reversible type ±1 kV to ±10 kV/200 W

EC series are a high voltage power supplies developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems (2ch) or bi-polar systems. Correspond to both Johnson-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

Feature&Outline

  • Specially designed for Electrostatic Chuck application
  • It has 2 output channels and suitable for bi-polar system with just 1 unit
  • Reversible output
  • Smooth release of wafer with polarity reverse function
  • Compact and high power

Models

Models Output
Voltage[kV]
(each channel)
Current[mA]
(each channel)
EC-1R200×2 0~±1 200
EC-3R67×2 0~±3 67
EC-5R40×2 0~±5 40
EC-6R33×2 ±6 33
EC-10R20×2 ±10 20

Specification

Example of waveform

Example of waveform

Example of forced discharge • Output relay

Example of forced discharge • Output relay

Option

-LRy

Output relay : function to separate PS and load electrically by remote control

-LRf(13.56M)

RF filter : 13.56MHz

-LRf(500K)

RF filter : 500kHz

-LB

Protective cover : For POWER switch and HV switch

-L(220V)

200VAC to 240VAC single phase input

-L(230V)

210VAC to 250VAC single phase input

-L(7m)

HV output cable 7m length (2)

*Wide range filter frequency is available optionally.
Please consult to sales staff.

How to Order

When ordering, suffix the above option mark to the model number.

[e.g.] HEC-1R200×2-LRf(13.56M)Ry(200V)(7m)
          (Alphabetical, input voltage and cable length order)

Other

AC Input cable

CABLE TYPE 1

with 3-pin plug

Standard(115V input)
  • CABLE TYPE 1
  • CABLE TYPE 1
CABLE TYPE 3

(Flying lead)

-L(220V)/-L(230) option
  • CN-BNC-HVPP(5)
  • CN-BNC-HVPP(5)

Output cable

CN-BNC-HVPP(5)*

(HV-BNC connector on both end)

1kV to 5kV models
  • CN-BNC-HVPP(5)
CN-15-MHVP(5)*

(Flying lead)

6kV and 10kV models
  • CN-15-MHVP(5)

*Standard is 5. It will be "7" when selected -L(7m) option.

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