EC Series
Electrostatic chuck power supplies
- Dual output rack mount
2ch output, Rack mount Reversible type ±1 kV to ±10 kV/200 W
EC series are a high voltage power supplies developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems (2ch) or bi-polar systems. Correspond to both Johnson-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
Feature&Outline
- Specially designed for Electrostatic Chuck application
- It has 2 output channels and suitable for bi-polar system with just 1 unit
- Reversible output
- Smooth release of wafer with polarity reverse function
- Compact and high power
Models
| Models | Output | |
|---|---|---|
| Voltage[kV] (each channel) |
Current[mA] (each channel) |
|
| EC-1R200×2 | 0~±1 | 200 |
| EC-3R67×2 | 0~±3 | 67 |
| EC-5R40×2 | 0~±5 | 40 |
| EC-6R33×2 | ±6 | 33 |
| EC-10R20×2 | ±10 | 20 |
Specification
Example of waveform
Example of forced discharge • Output relay
Option
-LRy
Output relay : function to separate PS and load electrically by remote control
-LRf（13.56M）
RF filter : 13.56MHz
-LRf（500K）
RF filter : 500kHz
-LB
Protective cover : For POWER switch and HV switch
-L(220V)
200VAC to 240VAC single phase input
-L(230V)
210VAC to 250VAC single phase input
-L(7m)
HV output cable 7m length (2)
*Wide range filter frequency is available optionally.
Please consult to sales staff.
How to Order
When ordering, suffix the above option mark to the model number.[e.g.] HEC-1R200×2-LRf(13.56M)Ry(200V)(7m)
(Alphabetical, input voltage and cable length order)
Other
AC Input cable
-
CABLE TYPE 1
with 3-pin plug
Standard（115V input） -
-
-
CABLE TYPE 3
（Flying lead）
-L(220V)/-L(230) option -
-
Output cable
-
CN-BNC-HVPP(5)*
（HV-BNC connector on both end）
1kV to 5kV models -
-
-
CN-15-MHVP（5）*
（Flying lead）
6kV and 10kV models -
-
*Standard is 5. It will be "7" when selected -L(7m) option.
Download
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-
EC series Datasheet
PDF（236KB）
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