NEW
E-chuck High Voltage Power Supply
Two-channels output type
- Max Voltage：±0.5 to ±7.5 kV
- Max Current: 1 to 20mA
- Two-channels output type
- Half rack size compact design
Wafer Sensor adopted
HECD series is a high voltage Amplifier power supply for electrostatic chucks. In addition to the polarity switching and forced grounding, the series offers a wafer monitoring system to satisfy wafer detection needs.
Furthermore, with the wide range of voltages, this series can support both coulombic and Johnsen-Rahbek electrostatic chucks.
Features and Benefits
- Reliability chucking/release status detection by wafer sensor
- Fast response by Amplifier architecture design (high reliability and long life by "non-relay polarity reverse" design.)
- "Two-channels independent control (option)" and "Center tap voltage setting (option)" for various chuck/release operation
- Equipped with digital interface of LAN, USB, RS-232C
- Built in low pass RF filter (13.56 MHz)
Main application
Models
| Model | Output | Output Response speed [typ] (－90%⇔+90%*2) |
|
|---|---|---|---|
| Voltage Max*1 (each channel) |
Current (each channel) |
||
| HECD-0.5B20×2 | +500V, -500V | 20 mA | 10 ms |
| HECD-1B10×2 | +1kV, -1kV | 10 mA | 10 ms |
| HECD-1.5B6×2 | +1.5kV, -1.5kV | 6 mA | 15 ms |
| HECD-2B5×2 | +2kV, -2kV | 5 mA | 20 ms |
| HECD-4B1×2 | +4kV, -4kV | 1 mA | 40 ms |
| HECD-4B2.5×2 | +4kV, -4kV | 2.5 mA | 40 ms |
| HECD-5B2×2 | +5kV, -5kV | 2 mA | 60 ms |
| HECD-7.5B1.2×2 | +7.5kV, -7.5kV | 1.2 mA | 90 ms |
- Include center tap Voltage, Bias Voltage.
- Typical Value at operation with no Load.
Discontinued Products
Sales of the following models ended on March, 2022. We continue to support the products.
| Model | Output | Successor | |
|---|---|---|---|
| Voltage | Current | ||
| HECD-0.5B10×2 | +500V, -500V | 10 mA | HECD-0.5B20×2 |
| HECD-1B3×2 | +1kV, -1kV | 3 mA | HECD-1B10×2 |
| HECD-1.5B2×2 | +1.5kV, -1.5kV | 2 mA | HECD-1.5B6×2 |
| HECD-2B3×2 | +2kV, -2kV | 3 mA | HECD-2B5×2 |
Specification
For details, download the datasheet below.
Characteristic of output Voltage Setting
Example of waveform
Options
- -LCt
-
Center tap bias
0 to ±[max rate Voltage -Voltage Setting Value]
- -LEc
-
Ether CAT interface
[coming soon]
- -LSep
-
Two-channels independent control
- -L(AC)
-
AC 100V to 240 V 1 φinput
- -L(7m)
-
Output High Voltage cable 7meters x 3
(2pcs when -LCt or -LSep is selected)
- Selecting -LCt and -LSep together is not allowed.
- -LCt and -LSep has no center tap terminal.
How to Order
To order, add Option No. to Model No. in alphabetic order followed by cable No.
Example: HECD-4B1×2-LSep(AC)(7m)
Accessories
| Standard | CN-SHV-HVPP(5)* |
 (with SHV connector on both end) |
* Standard is “5 meters”. It will be “7 meters” when selected -L(7 m) option. |
|---|
Dimensions
Download
-
HECD series Datasheet
Date: 2022-12-2 rev.05
PDF (1,270 KB)
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
HECD series Instruction Manual
Date: 2023-1-5 rev 0.5
PDF (1,786 KB)
The account registration is necessary for downloading
-
HECD series Datasheet
Date: 2022-12-2 rev.05
PDF (1,270 KB)
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2022-10-25 rev. 08
PDF (4,191 KB)
-
HECD series Instruction Manual
Date: 2023-1-5 rev 0.5
PDF (1,786 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
