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  • HECD series
  • HECD series

NEW

E-chuck High Voltage Power Supply

Two-channels output type

  • Max Voltage:±0.5 to ±7.5 kV
  • Max Current: 1 to 20mA
  • Two-channels output type
  • Half rack size compact design

Wafer Sensor adopted

HECD series is a high voltage Amplifier power supply for electrostatic chucks. In addition to the polarity switching and forced grounding, the series offers a wafer monitoring system to satisfy wafer detection needs.

Furthermore, with the wide range of voltages, this series can support both coulombic and Johnsen-Rahbek electrostatic chucks.

Features and Benefits

  • Reliability chucking/release status detection by wafer sensor
  • Fast response by Amplifier architecture design (high reliability and long life by "non-relay polarity reverse" design.)
  • "Two-channels independent control (option)" and "Center tap voltage setting (option)" for various chuck/release operation
  • Equipped with digital interface of LAN, USB, RS-232C
  • Built in low pass RF filter (13.56 MHz)

Main application

Models

Model Output Output Response speed [typ]
(-90%⇔+90%*2)
Voltage Max*1
(each channel)
Current
(each channel)
HECD-0.5B20×2 +500V, -500V 20 mA 10 ms
HECD-1B10×2 +1kV, -1kV 10 mA 10 ms
HECD-1.5B6×2 +1.5kV, -1.5kV 6 mA 15 ms
HECD-2B5×2 +2kV, -2kV 5 mA 20 ms
HECD-4B1×2 +4kV, -4kV 1 mA 40 ms
HECD-4B2.5×2 +4kV, -4kV 2.5 mA 40 ms
HECD-5B2×2 +5kV, -5kV 2 mA 60 ms
HECD-7.5B1.2×2 +7.5kV, -7.5kV 1.2 mA 90 ms
  1. Include center tap Voltage, Bias Voltage.
  2. Typical Value at operation with no Load.

Discontinued Products

Sales of the following models ended on March, 2022. We continue to support the products.

Model Output Successor
Voltage Current
HECD-0.5B10×2 +500V, -500V 10 mA HECD-0.5B20×2
HECD-1B3×2 +1kV, -1kV 3 mA HECD-1B10×2
HECD-1.5B2×2 +1.5kV, -1.5kV 2 mA HECD-1.5B6×2
HECD-2B3×2 +2kV, -2kV 3 mA HECD-2B5×2

Specification

For details, download the datasheet below.

Characteristic of output Voltage Setting

Characteristic of output Voltage Setting. | HECD | Electrostatic Chuck Power Supplies|Matsusada Precision

Example of waveform

Example of waveform. | HECD | Electrostatic Chuck Power Supplies|Matsusada Precision

Options

-LCt

Center tap bias
0 to ±[max rate Voltage -Voltage Setting Value]

-LEc

Ether CAT interface
[coming soon]

-LSep

Two-channels independent control

-L(AC)

AC 100V to 240 V 1 φinput

-L(7m)

Output High Voltage cable 7meters x 3
(2pcs when -LCt or -LSep is selected)

  • Selecting -LCt and -LSep together is not allowed.
  • -LCt and -LSep has no center tap terminal.

How to Order

To order, add Option No. to Model No. in alphabetic order followed by cable No.
Example: HECD-4B1×2-LSep(AC)(7m)

Accessories

Output cable
Standard CN-SHV-HVPP(5)* CN-SHV-HVPP
(with HV-BNC connector on both end)
* Standard is “5 meters”.
It will be “7 meters” when selected -L(7 m) option.

Dimensions

For details, download the datasheet below.

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