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Electron Beam (E-Beam) Evaporation is a thin film fabrication technique called Electron-beam Physical Vapor Deposition, or EBPVD. An electron beam generated from a filament is irradiated onto a deposition material (target). The target vaporizes and is deposited on the substrate (base material). A high acceleration voltage of 30-40 kV is used for the electron beam.

Matsusada Precision manufactures and sells power supplies for electron beam acceleration and filaments.

Recommended products

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Low profile and lightweight
High voltage power supply

Digital interface is available. Wide range of over 300 models, Various remote control and monitor functions

AK series

AK series

voltage range
1 to 120 kV
current
25 to 4250 mA
power
3 to 6.4 kW
High power 6.4 kW/Compact
High Voltage Power Supply

6.4 kW in 4 U, Digital interface is available. Wide range of over 100 models

AKP series

AKP series

voltage range
1 to 120 kV
current
0.1 to 13 A
power
12 to 13 kW
High Power High Voltage power supply

Master/slave function further enables extension at maximum 52 kW.

HEB series

HEB series

voltage range
-60 kV
current
5 A
Electron Beam Power Supply

Excellent temperature coefficient, Multifunction

RK series

RK series

voltage range
6 to 800 V
current
0.6 to 180 A
power
385 to 1200 W
Versatile benchtop
DC power supply

Available for 400 W output while being small size of only 2.8-inch in the width.

TB series

TB series

voltage range
35 to 1000 V
current
1 to 108 A
power
360W, 720W, 1080W
Wide range programmable
DC power supply

"Turbo function" installed, Compact, Suppressing voltage/current overshoot

REK/REKJ series

REK/REKJ series

voltage range
6 to 1500 V
current
1 to 1200 A
power
0.77 to 15 kW
Versatile, High-performance
DC power supply

Compact and High power, PFC circuit and universal input, Various operations is available

PRT series

PRT series

voltage range
80 to 1500 V
current
33 to 510 A
power
5 to 15 kW
High Power Wide Range DC Power Supply

Achieve a wide range of output, Variable internal resistance function