SPECIALIZED HIGH-VOLTAGE POWER SUPPLY FOR SCANNING ELECTRON MICROSCOPE (SEM)
Four integrated power supplies into a compact enclosure
- Accelerator:
0 to -15 kV or -30 kV - Suppressor:
0 to -300 V (option) - Extractor:
0 to +3.5 kV - Filament:
0 to 15 W
Low noise and high stability for superior resolution SEM
The SEM series power supply is a high voltage power supply specially designed for the electron gun of a scanning electron microscope. It contains the electron beam accelerator, floating extractor, suppressor and filament power supplies. Supports not only tungsten hairpin filament emitters and lanthanum hexaboride (LaB6) emission guns, but also various schottky emission electron guns can be supported by adding an optional power supply for suppressors. Therefore, it can also be used in semiconductor wafer inspection, such as CD-SEMs and review SEMs. We are also available for consultation on customization and OEM products for your electron gun configuration. Please feel free to contact us.
Please feel free to contact us.
FEATURES AND BENEFITS
- Lowest ripple noise and 5 ppm ultra high stability output
- Small footprint with compact body ideal for built-in use
- Better quality and resolution for SEM images
- Overcurrent protection and Output short-circuit protection
- Customizable to suit your electron gun configuration
- Power supply used for acceleration, bias, and filament heating in a compact body
- Additional power supply for suppressor (option)
- Optional support for Schottky emission electron guns
APPLICATIONS
- Scanning Electron Microscope (SEM) electron gun power supply
- Field Emission Gun (FEG) power supply
- High-resolution SEM power supply for Schottky emission sources
- Wafer and Mask inspection with CD-SEM and Review SEM
- Electron Probe Micro-Analyzer (EPMA) power supply
- Auger Electron Spectroscopy (AES) electron gun power supply
Models
| Model | Output voltage | |||
|---|---|---|---|---|
| High Voltage Accelerating | Biasing (Extractor) | Suppressor (option) | Filament | |
| SEM-15 | 0 to -15 kV | 0 to +3.5 kV | 0 to -300 V | 5 V max |
| SEM-30 | 0 to -30 kV | |||
Specifications
- Input voltage
- 24 Vdc
- Output voltage control
- External control voltage (Vcon-in) 0 to 10 Vdc for each power supply
Options
- -LFcc
-
Constant current filament output
For specifications, download the datasheet below.
* -LFcv and -LFcc cannot be chosen together.
- -LFcv
-
Constant voltage filament output
For specifications, download the datasheet below.
* -LFcv and -LFcc cannot be chosen together.
- -LS03
-
Adding the power supply for suppressor
How to Order
When placing an order, please add the option code(s) after the model name. If adding two or more options, omit the “-L” from the second and subsequent option codes, and list them in alphabetical order, with the output cable length option placed at the end.
Example: SEM-15-LFcc, SEM-30-LFcvS03
ADDITIONAL ACCESSORIES
- High Voltage Cable
-
Standard CN-SEM4P 
Output cable with plug (flying lead)1.5 meters length -LS03 option selected CN-SEM4P-S03 
Output cable with plug (flying lead)1.5 meters length The model number of output cable will change when -LS03 option is chosen. Please contact our sales office for details.
Custom Cable Length
Specify cable length in 1 m increments (max. 5 m) by adding the desired length in parentheses after the model name. Terminal length not included.
[Example] CN-SEM4P(5): 5 m, CN-SEM4P-S03(5): 5 m
Diagram
Connection diagram
Dimensions
SEM-15: 250 x 200 x 106mm (9.84" x 7.87" x 4.17")
SEM-30: 250 x 250 x 106mm (9.84" x 9.84" x 4.17")
For details, download the datasheet below.
Download
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-
SEM series Datasheet
Date: 2025-12-02 rev 20
PDF (1,182 KB)
-
High Voltage Power Supply Modules Selection Guide
Date: 2025-06-30 rev.18
PDF (4,914 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
SEM series 3D MODELS (STEP, IGES)
Date: 2025-06-25
ZIP (2,764 KB)
Login Required
-
SEM series Datasheet
Date: 2025-12-02 rev 20
PDF (1,182 KB)
-
High Voltage Power Supply Modules Selection Guide
Date: 2025-06-30 rev.18
PDF (4,914 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
SEM series 3D MODELS (STEP, IGES)
Date: 2025-06-25
ZIP (2,764 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
