SPECIALIZED HIGH-VOLTAGE POWER SUPPLY FOR SCANNING ELECTRON MICROSCOPES (SEM)
Four integrated power supplies into a compact enclosure
- Accelerator:
0 to -15 kV or -30 kV - Suppressor:
0 to -300 V (option) - Extractor:
0 to +3.5 kV - Filament:
0 to 15 W
Low noise and high stability for superior resolution SEM
The SEM Series is a multi-output high-voltage power supply engineered specifically for electron guns in Scanning Electron Microscopes (SEMs). The compact module integrates outputs for the accelerator, extractor, suppressor, and filament. It supports standard Tungsten hairpin and Lanthanum Hexaboride (LaB6) emitters. Additionally, an optional suppressor output enables compatibility with Schottky field emission guns, making the series suitable for high-resolution semiconductor wafer inspection systems, such as CD-SEMs and review SEMs. We also offer customization services to meet specific electron gun configurations for OEM integration.
Please feel free to contact us.
FEATURES AND BENEFITS
- Ultra-low ripple noise with 5 ppm high stability output
- Compact footprint ideal for system integration
- Contributes to high-resolution SEM imaging
- Includes overcurrent and output short-circuit protection
- Customizable to suit specific electron gun configurations
- Integrates acceleration, bias, and filament outputs in a single unit
- Optional output available for suppressor
- Supports Schottky emission electron guns (optional)
APPLICATIONS
- Scanning Electron Microscope (SEM) electron gun power supply
- Field Emission Gun (FEG) power supply
- High-resolution SEM power supply for Schottky emission sources
- Wafer and Mask inspection with CD-SEM and Review SEM
- Electron Probe Micro-Analyzer (EPMA) power supply
- Auger Electron Spectroscopy (AES) electron gun power supply
Models
| Model | Output voltage | |||
|---|---|---|---|---|
| Accelerating power supply | Biasing (Extractor) power supply |
Power supply for suppressor S03 (option) |
Filament power supply | |
| SEM-15 | 0 to -15 kV | 0 to +3.5 kV | 0 to -300 V | 5 V max |
| SEM-30 | 0 to -30 kV | |||
Specifications
- Input voltage
- 24 Vdc
- Output voltage control
- External control voltage (Vcon-in) 0 to 10 Vdc for each power supply
Options
- -LFcc
-
Constant current filament output
For specifications, download the datasheet below.
* -LFcv and -LFcc cannot be chosen together.
- -LFcv
-
Constant voltage filament output
For specifications, download the datasheet below.
* -LFcv and -LFcc cannot be chosen together.
- -LS03
-
Adding the power supply for suppressor
How to Order
When placing an order, please add the option code(s) after the model name. If adding two or more options, omit the “-L” from the second and subsequent option codes, and list them in alphabetical order, with the output cable length option placed at the end.
Example: SEM-15-LFcc, SEM-30-LFcvS03
ADDITIONAL ACCESSORIES
- High Voltage Cable
-
Standard CN-SEM4P 
Output cable with plug (flying lead)1.5 meters length -LS03 option selected CN-SEM4P-S03 
Output cable with plug (flying lead)1.5 meters length The model number of output cable will change when -LS03 option is chosen. Please contact our sales office for details.
Custom Cable Length
Specify cable length in 1 m increments (max. 5 m) by adding the desired length in parentheses after the model name. Terminal length not included.
[Example] CN-SEM4P(5): 5 m, CN-SEM4P-S03(5): 5 m
Diagram
Connection diagram
Dimensions
SEM-15: 250 x 200 x 106mm (9.84" x 7.87" x 4.17")
SEM-30: 250 x 250 x 106mm (9.84" x 9.84" x 4.17")
For details, download the datasheet below.
Download
If you are unable to download a file
Please try the following solution.
- Please press Ctrl+F5 to clear the cache of your web browser and try again.
- Please restart your web browser and log in again to try again.
- Please change your web browser to another browser and try again.
- Restart the computer and try again.
- Please try again on a different computer.
-
SEM series Datasheet
Date: 2026-03-13 rev 21
PDF (1,251 KB)
-
High Voltage Power Supply Modules Selection Guide
Date: 2026-01-28 rev 19
PDF (4,914 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
SEM series 3D MODELS (STEP, IGES)
Date: 2025-06-25
ZIP (2,764 KB)
Login Required
-
SEM series Datasheet
Date: 2026-03-13 rev 21
PDF (1,251 KB)
-
High Voltage Power Supply Modules Selection Guide
Date: 2026-01-28 rev 19
PDF (4,914 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
SEM series 3D MODELS (STEP, IGES)
Date: 2025-06-25
ZIP (2,764 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
