Electrostatic Chuck power supply
Dual output fast response rack mount
- ±1 kV to ±10 kV
- 6 W, 10 W, 30 W
- Single ch output
- 2 ch output (Some models)
RACKMOUNT and SINGLE/2-CH BIPOLAR OUTPUT ±1kV to ±10kV/5W, 6W, 10W, 30W
The ECA series is a high-voltage power supply developed especially for electrostatic chuck applications. The wafer can be held or released by DC ON/OFF. Smooth wafer release is achieved by reversing the polarity. This electrostatic chuck power supply is a convenient power supply suitable for unipolar systems (2 ch) or bipolar systems. Compatible with both Johnsen-Rahbek and Coulomb types due to the wide product range of ±1 kV to ±10 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) application
- Dual output channels
- Bipolar output
- Built-in RF filter is available. (option)
- Fast response (100 ms) with amplifier structure
- Uses no relay, so high reliability and long life
MAIN APPLICATION
Models
| Model | Output | Input Current [A] (at AC115 V) max |
||
|---|---|---|---|---|
| Voltage [kV] | Current [mA] | Channel | ||
| ECA-1B6 x 2 | 0 t ±1 kV | 6 mA | 2 ch | 1 A |
| ECA-1B30 x 2 | 30 mA | 2 ch | 3 A | |
| ECA-3B2 x 2 | 0 to ±3 kV | 2 mA | 2 ch | 1 A |
| ECA-3B10 x 2 | 10 mA | 2 ch | 3 A | |
| ECA-5B1 x 2 | 0 to ±5 kV | 1 mA | 2 ch | 1 A |
| ECA-5B6 x 2 | 6 mA | 2 ch | 3 A | |
| ECA-10B1 x 2 | 0 to ±10 kV | 1 mA | 2 ch | 1 A |
| ECA-10B0.5 | 0.5 mA | 1 ch | 1 A | |
| ECA-10B3 | 3 mA | 1 ch | 3 A | |
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single phase
- Output Voltage Control
-
[Local] 10-turn potentiometer on the front panel (for each channel)
[Analog remote] External control voltage -10 to +10 V
For details, download the datasheet below.
Waveform Example
Example of forced discharge and Output relay
Options
- -LPo
-
Polarity change
Local: toggle switch
Remote: contact input (for each channel)
- -LRf(13.56M)
-
RF filter 13.56 MHz
- -LRf(500k)
-
RF filter 500 kHz
- -LRy
-
Output relay
Function to separate PS and load electrically by remote control
- -LVI
-
Output voltage-limiter
0% to 100% controllable with a front panel potentiometer.
- -L(7m)
-
High Voltage output cable 7m length x 2
Note: A Wide range of filter frequencies is available optionally. Please consult to sales staff.
Unipolar type is available.
How to Order
When ordering, add the Option No. to the Model No. in alphabetical order, followed by numerical order and then the cable length. Example: ECA-1B6x2-LPoRf(13.56M)RyVI(7m)
Accessories
| Standard 115 V input * |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|
*: Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
5 meters |
|---|---|---|---|
| Standard [10 kV models] |
CN-15-MHVP(5)* |
 Flying lead |
5 meters |
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
ECA series Instruction Manual
Date: 2021-06-03 rev. 3.0
PDF (721 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
ECA series Instruction Manual
Date: 2021-06-03 rev. 3.0
PDF (721 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
