ELECTROSTATIC CHUCK
HIGH VOLTAGE POWER SUPPLY
CMPACT AND HIGH-POWER
- ±1 kV to ±10 kV
- 200 W
- Dual output
- Reversible type
2 Channel Output, Rack-Mount Reversible type ±1 kV to ±10 kV/200 W
The EC series is a high-voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF can be controlled by DC ON/OFF. 「Smooth wafer release is achieved by reversing the polarity. This electrostatic chuck power supply is a convenient power supply suitable for unipolar systems (2-channel) or bipolar systems. Compatible with both Johnsen-Rahbek and Coulomb types due to the wide product range of ±1 kV to ±10 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) application
- It has 2 output channels and suitable for a bipolar system with just 1 unit
- Reversible output
- Smooth release of the wafer with polarity reverse function
- Compact and high power
MAIN APPLICATION
Models
| Models | Output | |
|---|---|---|
| Voltage [kV] (each channel) |
Current [mA] (each channel) |
|
| EC-1R200 x 2 | 0 to ±1 kV | 200 mA |
| EC-3R67 x 2 | 0 to ±3 kV | 67 mA |
| EC-5R40 x 2 | 0 to ±5 kV | 40 mA |
| EC-6R33 x 2 | 0 to ±6 kV | 33 mA |
| EC-10R20 x 2 | 0 to ±10 kV | 20 mA |
Specifications
- Input voltage
- 115 Vac ±10％ （103.5 to 126.5 Vac）, 50/60 Hz, Single-phase
- Output Voltage Control
-
[Local] 10-turn potentiometer on the front panel (for each channel)
[Analog remote] External control voltage 0 to 10 V
For details, download the datasheet below.
Waveform Example
「Output Voltage Setting Characteristics
Options
- -LRf(500k)
-
RF filter: 500 kHz *
- -LRf(13.56M)
-
RF filter: 13.56 MHz *
- -LRy
-
Output relay: Function to separate PS and load electrically by remote control
- -L(220V)
-
200 Vac to 240 Vac single phase input
- -L(230V)
-
210 Vac to 250 Vac single phase input
- -L(7m)
-
High Voltage output cable 7 m length: 2
Note: “*” cannot be selected together. Need to be selected either one.
The wide range filter frequency is available optionally. Please consult the sales staff.
How to Order
When ordering, add the Option No. to the Model No. in alphabetical order, followed by numerical order and then the cable length.
Example: EC-1R200x2-LRf(13.56M)Ry(200V)(7m)
Accessories
| Standard 115 V input |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|---|---|---|---|---|
| Standard -L(220V)/-L(230V) option |
CABLE TYPE3 | |
 |
250 V / 10 A | 2.5 meters Fixed length |
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
Standard is "5 meters". |
|---|---|---|---|
| Standard [6 kV and 10 kV models] |
CN-15-MHVP(5)* |
 Flying lead |
Standard is "5 meters". |
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
If you are unable to download a file
Please try the following solution.
- Please press Ctrl+F5 to clear the cache of your web browser and try again.
- Please restart your web browser and log in again to try again.
- Please change your web browser to another browser and try again.
- Restart the computer and try again.
- Please try again on a different computer.
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
EC series Instruction Manual
Date: 2021-02-10 rev. 0.6
PDF (588 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
EC series Instruction Manual
Date: 2021-02-10 rev. 0.6
PDF (588 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
