• ECUB series | Electrostatic Chuck power supply Benchtop | Matsusada Precision
  • ECUB series | Electrostatic Chuck power supply Benchtop | Matsusada Precision


E-chuck High Voltage Power Supply

ECUB series is no longer available as we have stopped the production and sales this model in August 2022. Meanwhile, we support. HECD series is available as the successor model, and more information on the series can be found here.

HECD series

+ and -, 2ch Unit Reversible type

ECUB Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Features and Benefits

  • Designed for Electrostatic Chuck (E-chuck) application
  • + and -, 2 outputs type
  • Output reversible function for smooth release

Main application


Models Maximum Output
Voltage [kV] Current [mA]
ECUB-1PN2.5 (R) 0 to ±1 kV 2.5 mA
ECUB-2PN1.2 (R) 0 to ±2 kV 1.2 mA
ECUB-4PN0.6 (R) 0 to ±4 kV 0.6 mA
ECUB-6PN0.4 (R) 0 to ±6 kV 0.4 mA


For details, download the datasheet below.


-LCt: Center tap

-LFg: Forced grounding

How to Order

When ordering, add Option No. to Model No. in alphabetical, order.


Output cable (Accessories)

with SHV connector on both end
  • CN-SHV-HVPP(5)


For details, download the datasheet below.


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