Discontinuation Notice Production and sales of the ECUB series ended in August 2022. Please refer to the successor model, the HECD series, for new requirements.
HECD seriesDual-Channel Output (Positive/Negative) with Polarity Reversal
The ECUB series is a high-voltage power supply optimized for electrostatic chuck (E-chuck) applications. It features dual-channel output and a polarity reversal function, ensuring smooth wafer clamping and release.
Features and Benefits
- Optimized for electrostatic chuck (E-chuck) applications
- Dual-channel output (Positive and Negative)
- Polarity reversal function for smooth wafer release
Main application
Models
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECUB-1PN2.5 (R) | 0 to ±1 kV | 2.5 mA |
| ECUB-2PN1.2 (R) | 0 to ±2 kV | 1.2 mA |
| ECUB-4PN0.6 (R) | 0 to ±4 kV | 0.6 mA |
| ECUB-6PN0.4 (R) | 0 to ±6 kV | 0.4 mA |
Specifications
Options
-LCt: Center tap
-LFg: Forced grounding
How to Order
- When ordering, add Option No. to Model No. in alphabetical, order.
-
- Example:
- ECUB-1PN2.5(R)-LCtFg
Cable
Output cable (Accessories)
- CN-SHV-HVPP (5)
- with SHV connector on both ends
-
Dimensions
Download
If you are unable to download a file
Please try the following solution.
- Please press Ctrl+F5 to clear the cache of your web browser and try again.
- Please restart your web browser and log in again to try again.
- Please change your web browser to another browser and try again.
- Restart the computer and try again.
- Please try again on a different computer.
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
