E-Chuck High Voltage Power Supply
Halfrack width space-saving design
- ±1 kV to ±5 kV
- 30 W
- Single channel output
- Fast response model
SINGLE CHANNEL, BENCHTOP BIPOLAR TYPE ±1 kV TO ±5 kV/6 W, 30 W
The EJC series is a high-voltage power supply developed especially for electrostatic chuck (E-Chuck, ESC) applications. Chuck ON/OFF is possible by DC ON/OFF. Smooth wafer release is achieved by reversing the polarity. Compatible with both Johnsen-Rahbek and Coulomb types due to the wide product range of ±1 kV to ±5 kV.
FEATURES AND BENEFITS
- Specially designed for Electrostatic Chuck (E-Chuck, ESC) applications
- Fast response (100 ms) with amplifier structure
- Bipolar output
- Integrated RF filter (optional)
- Long lifespan and high reliability achieved through relay-free design
MAIN APPLICATION
Models
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single-phase
- Output voltage control
-
[Local] 10-turn potentiometer on the front panel
[Analog remote] External control voltage -10 to +10 V
For details, download the datasheet below.
Example of waveform
Options
- -LB
-
Protective cover
For POWER switch and High Voltage switch
- -LPo
-
Polarity change
Local: toggle switch
Remote: contact input
- -LRf(13.56M)
-
RF filter 13.56 MHz
*Cannot be used together with -LRf(500k) option.
- -LRf(500k)
-
RF filter 500 kHz
*Cannot be used together with -LRf(13.56M) option.
- -LRy
-
Output relay
Function to separate PS and load electrically by remote control
- L(7m)
-
High voltage output cable 7 meters length x 2
Note: RF filter has wide ranges of frequencies. Feel free to contact us for details. Unipolar type is available.
Wide range of filter frequencies are available optionally. Please consult to sales staff.
How to Order
When ordering, add the Option No. to the Model No. in alphabetical order, followed by numerical order and then the cable length. Example: EJC-1B6-LBPoRf(13.56M)Ry(7m)
Accessories
| Standard [115 V input *] |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|
*: Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
5 meters |
|---|
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
EJC series Instruction Manual
PDF (255 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
EJC series Instruction Manual
PDF (255 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
