E-Chuck High Voltage Power Supply
Halfrack width space-saving design
- ±1 kV to ±5 kV
- 30 W
- Single channel output
- Fast response model
SINGLE CHANNEL, BENCHTOP BIPOLAR TYPE ±1 kV TO ±5 kV/6 W, 30 W
The EJC series is a benchtop high-voltage power supply engineered specifically for electrostatic chuck (E-Chuck/ESC) applications. Its bipolar output capability allows for smooth wafer release by reversing polarity, eliminating the need for mechanical relays. With a wide voltage range of ±1 kV to ±5 kV, the series supports both Coulomb and Johnsen-Rahbek force applications.
FEATURES AND BENEFITS
- Designed specifically for Electrostatic Chuck (E-Chuck/ESC) applications
- Fast response (100 ms) enabled by high-speed amplifier design
- Bipolar output for efficient clamping and declamping
- Optional integrated RF filter
- Relay-free design ensures high reliability and long service life
MAIN APPLICATION
Models
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single-phase
- Output voltage control
-
[Local] 10-turn potentiometer on the front panel
[Analog remote] External control voltage -10 to +10 V
For details, download the datasheet below.
Example of waveform
Options
- -LB
-
Protective cover
For POWER switch and High Voltage switch
- -LPo
-
Polarity change
Local: toggle switch
Remote: contact input
- -LRf(13.56M)
-
RF filter 13.56 MHz
*Cannot be used together with -LRf(500k) option.
- -LRf(500k)
-
RF filter 500 kHz
*Cannot be used together with -LRf(13.56M) option.
- -LRy
-
Output relay
Function to separate PS and load electrically by remote control
- L(7m)
-
High voltage output cable 7 meters length x 2
Note: Various RF filter frequencies are available as options. Unipolar configurations are also available upon request.
Please contact us for details.
How to Order
When ordering, add the Option No. to the Model No. in alphabetical order, followed by numerical order and then the cable length. Example: EJC-1B6-LBPoRf(13.56M)Ry(7m)
Accessories
| Standard [115 V input *] |
CABLE TYPE1 |  |
 |
125 V / 10 A | 2.5 meters Fixed length |
|---|
*: Purchase CABLE TYPE 3 input cable when input voltage is 200 V.
| Standard [1 kV to 5 kV models] |
CN-BNC-HVPP(5)* |
 MHV connector on both end |
5 meters |
|---|
*: Standard is “(5)”. It will be “(7)” when selected -L(7m) option.
Dimensions
Download
If you are unable to download a file
Please try the following solution.
- Please press Ctrl+F5 to clear the cache of your web browser and try again.
- Please restart your web browser and log in again to try again.
- Please change your web browser to another browser and try again.
- Restart the computer and try again.
- Please try again on a different computer.
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
EJC series Instruction Manual
PDF (255 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
EJC series Instruction Manual
PDF (255 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
