E-Chuck High Voltage Power Supply
positive/negative bipolar high-voltage output, dual-channel Unit type
- ±0.5kV to ±5kV
- 2W to 10W
- ±500V lineup
- RF filter as standard
COMPACT HIGH VOLTAGE POWER SUPPLY FOR E-CHUCK APPLICATION
The Matsusada Precision ECU series is a compact high-voltage power supply designed specifically for electrostatic chuck (E-Chuck) applications. It offers dual-channel outputs with voltages ranging from ±0.5kV to ±5kV and power ratings from 2W to 10W. Key features include output reversibility, grounding function for smooth release, integrated RF filter, and multiple control options (local, remote, or RS-232C). The series is available in various models with different voltage and current specifications. It's equipped with output ON/OFF and polarity reverse functions for smooth chuck and de-chuck operations. The ECU series is ideal for applications requiring precise control of electrostatic chucks in semiconductor manufacturing and research environments.
FEATURES AND BENEFITS
- Designed for Electrostatic Chuck (E-Chuck, ESC) application
- Dual-channel bipolar output
- Reversible output and grounding function for smooth wafer release
- RF filter integrated
- Local, Remote, or RS-232C controlled
MAIN APPLICATION
Models
More high voltage models are available. Contact nearby sales office.
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECU-0.5PN10 (R) | 0 to ±0.5 kV | 10 mA |
| ECU-1PN3 (R) | 0 to ±1 kV | 3 mA |
| ECU-1.5PN2 (R) | 0 to ±1.5 kV | 2 mA |
| ECU-2PN1 (R) | 0 to ±2 kV | 1 mA |
| ECU-2PN3 (R) | 0 to ±2 kV | 3 mA |
| ECU-4PN1 (R) | 0 to ±4 kV | 1 mA |
| ECU-5PN2 (R) | 0 to ±5 kV | 2 mA |
Specifications
- Input voltage
- 24 Vdc ±5% (22.8 to 25.2 Vdc)
- Output voltage control
-
[Local] Setting knob on the front panel
[Analog remote] External control voltage 0 to 10 V
[Digital remote] Command
For details, download the datasheet below.
Waveform example
Output voltage setting characteristics
Options
- -L(7m)
-
High-voltage output cables with HV-BNC connectors on both ends, 7 meters in length (2 cables)
How to Order
When ordering, add the Option No. to the Model No.
Example: ECU-0.5PN10(R) -L(7m)
Accessories
| Standard | CN-BNC-HVPP(5) * |  MHV connector on both end |
5 meters (Specified length available) |
|---|
*: Standard is "(5)". It will be "(7)" when selected -L(7m) option.
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
ECU series Instruction Manual
PDF (707 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
ECU series Instruction Manual
PDF (707 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
