E-Chuck High Voltage Power Supply
Bipolar high-voltage output, dual-channel benchtop power supply
- ±0.5 kV to ±5 kV
- 2 W to 10 W
- Models available from ±500 V
- Built-in RF filter
Compact High-Voltage Power Supply for E-Chuck Applications
The ECU series is a compact high-voltage power supply engineered specifically for electrostatic chuck (E-Chuck) applications. It features dual-channel bipolar outputs with voltages ranging from ±0.5 kV to ±5 kV and power ratings from 2 W to 10 W.
Key features include reversible output polarity and a forced grounding function, ensuring smooth wafer clamping and release (de-chucking). An integrated RF filter protects the power supply from noise, while control options include local front-panel operation, analog remote, and RS-232C digital communication. The ECU series is ideal for applications requiring precise control of electrostatic chucks in semiconductor manufacturing and research environments.
FEATURES AND BENEFITS
- Designed for Electrostatic Chuck (E-Chuck, ESC) application
- Dual-channel bipolar output
- Reversible output and grounding function for smooth wafer release
- RF filter integrated
- Supports Local, Analog Remote, and RS-232C control
MAIN APPLICATION
Models
More high voltage models are available. Contact nearby sales office.
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECU-0.5PN10 (R) | 0 to ±0.5 kV | 10 mA |
| ECU-1PN3 (R) | 0 to ±1 kV | 3 mA |
| ECU-1.5PN2 (R) | 0 to ±1.5 kV | 2 mA |
| ECU-2PN1 (R) | 0 to ±2 kV | 1 mA |
| ECU-2PN3 (R) | 0 to ±2 kV | 3 mA |
| ECU-4PN1 (R) | 0 to ±4 kV | 1 mA |
| ECU-5PN2 (R) | 0 to ±5 kV | 2 mA |
Specifications
- Input voltage
- 24 Vdc ±5% (22.8 to 25.2 Vdc)
- Output voltage control
-
[Local] Setting knob on the front panel
[Analog remote] External control voltage 0 to 10 V
[Digital remote] Command
For details, download the datasheet below.
Waveform example
Output voltage setting characteristics
Options
- -L(7m)
-
High-voltage output cables with HV-BNC connectors on both ends, 7 meters in length (2 cables)
How to Order
When ordering, add the Option No. to the Model No.
Example: ECU-0.5PN10(R) -L(7m)
Accessories
| Standard | CN-BNC-HVPP(5) * |  MHV connector on both end |
5 meters (Specified length available) |
|---|
*: The standard length is 5 meters. If the -L(7m) option is selected, the length is 7 meters.
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
ECU series Instruction Manual
PDF (707 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
ECU series Instruction Manual
PDF (707 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
