Electrostatic Chuck Power Supplies
Electrostatic chuck power supplies (E-Chuck power supplies or ESC supplies) are specialized high-voltage power supplies from Matsusada Precision. We offer a wide range of models designed for semiconductor manufacturing processes and R&D applications. Addressing the critical need for smooth and reliable chucking and wafer release, our E-Chuck power supplies are equipped with advanced RF filters to ensure the stable, low-noise performance required for precision environments.
A comprehensive selection is available, including monopolar, bipolar, dual-tracking, general-purpose, and compact module types, designed to meet the demands of wafers and LCD glass substrates. We also provide OEM and custom power supply solutions for semiconductor manufacturing equipment.
For information on the principles and uses of the E-Chuck, please refer to the application note: Electrostatic Chuck (E-Chuck, ESC).
