• ECUB series | Electrostatic Chuck power supply Benchtop | Matsusada Precision
  • ECUB series | Electrostatic Chuck power supply Benchtop | Matsusada Precision

ECUB series

E-chuck HV Power Supply

+ and -, 2ch Unit Reversible type

ECUB Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Features and Benefits

  • Designed for Electrostatic Chuck (E-chuck) application
  • + and -, 2 outputs type
  • Output reversible function for smooth release

Models

Models Maximum Output
Voltage [kV] Current [mA]
ECUB-1PN2.5 (R) 0 to ±1 2.5
ECUB-2PN1.2 (R) 0 to ±2 1.2
ECUB-4PN0.6 (R) 0 to ±4 0.6
ECUB-6PN0.4 (R) 0 to ±6 0.4

Specifications

For details, download the datasheet below.

Options

-LCt: Center tap

-LFg: Forced grounding

How to Order

When ordering, add Option No. to Model No. in alphabetical, order.
Example:
ECUB-1PN2.5(R)-LCtFg

Dimensions

For details, download the datasheet below.

Cable

Output cable (Accessories)

CN-SHV-HVPP (5)
with SHV connector on both end
  • CN-SHV-HVPP(5)

Download

The account registration is necessary for downloading

In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.

Please click here if you are not registered yet to our site.

Membership Registration (Free)

Please click here if you are already registered to our site.

Log in

Information on related articles in Technical Knowledge

Electrostatic Chuck Power Supplies

Search for related to Electrostatic Chuck Power Supplies