• ECUB series
  • ECUB series

ECUB series

E-chuck HV Power Supply

+ and -, 2ch Unit Reversible type

ECBU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Features and Benefits

  • Designed for Electrostatic Chuck (E-chuck) application
  • + and -, 2 outputs type
  • Output reversible function for smooth release


Models Maximum Output
Voltage [kV] Current [mA]
ECUB-1PN2.5 (R) 0 to ±1 2.5
ECUB-2PN1.2 (R) 0 to ±2 1.2
ECUB-4PN0.6 (R) 0 to ±4 0.6
ECUB-6PN0.4 (R) 0 to ±6 0.4


For details, download the datasheet below.


-LCt: Center tap

-LFg: Forced grounding

How to Order

When ordering, add Option No. to Model No. in alphabetical, order.


For details, download the datasheet below.


Output cable (Accessories)

with SHV connector on both end
  • CN-SHV-HVPP(5)


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