• ECG series | Electrostatic Chuck power supply Rackmount  | Matsusada Precision
  • ECG series | Electrostatic Chuck power supply Rackmount  | Matsusada Precision


E-chuck High Voltage Power Supplies

ECG series is no longer available as we stopped the production and sales of this model in November 2020. Meanwhile, we support.

Single Output, Rack-mount Reversible type -1 kV to +1 kV/±10 W

ECG Series are high voltage power supplies developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. The polarity can be reversed by the switch on the front panel or the contact signal. Also, it is possible to output zero-cross bipolar output with the external control voltage.

Features and Benefits

  • Specially designed for Electrostatic Chuck (E-chuck) application
  • Fast response with electronically polarity change
  • Bipolar Output
  • Uses no relay, so high reliability and long life

Main application


Model Output Input Current
(at AC100 V) max
Voltage [kV] Current [mA]
ECG-1B10 0 to ±1 kV 10 mA 1 A


For details, download the datasheet below.


For details, download the datasheet below.


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