Discontinuation Notice Production and sales of the ECG series ended in November 2020. Please contact us regarding repair support or replacement models.
Rack-mount High-Voltage Power Supply with Reversible Output (-1 kV to +1 kV / ±10 W)
The ECG series is a high-voltage power supply designed specifically for electrostatic chuck (E-chuck) applications. Wafer clamping and release are controlled via DC output. The unit features a polarity reversal function, enabling smooth dechucking of wafers. Polarity can be switched using the front panel or an external contact signal. Additionally, the series supports zero-cross bipolar output via external control voltage.
Features and Benefits
- Optimized for Electrostatic Chucks: Designed specifically for E-chuck applications.
- Fast Response: High-speed electronic polarity switching.
- Bipolar Output: Supports zero-cross bipolar operation.
- High Reliability: Relay-free design ensures a long service life.
Main application
Models
| Model | Output | Input Current (at AC100 V) max |
|
|---|---|---|---|
| Voltage [kV] | Current [mA] | ||
| ECG-1B10 | 0 to ±1 kV | 10 mA | 1 A |
Specifications
Dimensions
Download
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ECG series Datasheet
PDF（146KB）
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
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-
ECG series Datasheet
PDF（146KB）
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
