Rack Mount Electrostatic Chuck Power Supplies ECG series

  • ECG series
  • ECG series

Discontinued ECG series

E-chuck HV Power Supplies

ECG series is no longer available as we have stopped the production and sales this model in November 2020. Meanwhile, we support.

Single Output, Rack-mount Reversible type -1 kV to +1 kV/±10 W

ECG Series are high voltage power supplies developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. The polarity can be reversed by the switch on the front panel or the contact signal. Also, it is possible to output zero-cross bipolar output with the external control voltage.

Features and Benefits

  • Specially designed for Electrostatic Chuck (E-chuck) application
  • Fast response with electronically polarity change
  • Bipolar Output
  • Uses no relay, so high reliability and long life

Models

Model Output Input Current
(at 100 V) max
Voltage [kV] Current [mA]
ECG-1B10 0 to ±1 10 1 A

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