Electrostatic Chuck Power Supplies

Electrostatic chuck power supplies are high-voltage power supplies specialized for electrostatic chucks(E-chuck, ESC). Matsusada precision offers a wide range of high-voltage power supply series for electrostatic chucks. Based on customer feedback, we recognized a considerable need for smooth and reliable chucking and wafer release in the Semiconductor, OEM, and R&D marketplaces. A wide-range list of models is available from single polar type, bipolar type, dual tracking type, generic and multi-purpose type, or compact module type, which will be required for wafers and LCD glass substrates.

Benchtop Type

Rack Mount Type

Module Type

Electrostatic Chuck Power Supplies

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