Electrostatic Chuck Power Supplies

Matsusada is pleased to present our E-Chuck series of High Voltage Power Supplies. Based on customer feedback, we recognized a considerable need for smooth and reliable chucking and wafer release in the Semiconductor, OEM, and R&D marketplaces. A wide range list of line-up is available from single polar type, bi-psolar type, dual tracking type, generic and multi-porpose type or compact module type which will be required for wafers and LCD glass substrates.

Bench Top Type

Rack Mount Type

Module Type

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Electrostatic Chuck Power Supplies

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