Announcing a new solution to the power supply range of electrostatic chuck HV power supplies, HECD series
Matsusada Precision unveiled a new electrostatic chuck HV power supplies, HECD series to meet the wafer monitoring needs apart from polarity reverse as well as forced discharge function.
The HECD series is available with a wide range of output voltage from 0.5kV to 5kV for each channel. It also supports both coulombic and Johnsen-Rahbek electrostatic chucks. (6 models for sale)
Equipped with digital interface (LAN, USB, and RS-232C), the HECD series is best suited to the development in multifunctional and high precision systems of automatic inspection and measurement.
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HECD series Electrostatic Chuck HV Power Supply
HECD series offers wafer sensor function enabling reliability chuck/release status detection Also, it comes with the amplifier structure, providing fast response and long service life without polarity reverse relay. Optional "Two-channel independent control" and "Output with center tap" are ready for chuck/release condition.