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High-voltage Power Supply for ESCs
Detects wafer holding status with precision.
Minimizes wafer transfer errors and improves yield.
Ensure reliable wafer handling with real-time sensing.
This series combines stable high-voltage output with advanced monitoring capabilities. By detecting minute changes in capacitance, the proprietary Wafer Sensing Function accurately confirms wafer chucking and release status. This technology significantly reduces the risk of wafer damage caused by transfer errors.
Key advantages include:
- Predictive Maintenance: Continuous monitoring of leakage current helps identify ESC aging before line stoppages occur.
- Intelligent Integration: Standard EtherCAT communication and arbitrary waveform generation support high-precision automated lines.
FEATURES AND BENEFITS
- Ultra-Compact Half-Rack Design: Ideal for space-constrained systems and easy integration.
- Enhanced Throughput: Advanced polarity reversal enables smooth, high-speed de-chucking.
- Reliable Wafer Sensing: Integrated capacitance monitoring ensures secure holding and release.
- Long-Life Solid State Design: Relay-free polarity switching offers ultra-fast response and extended durability.
- Flexible Configuration: Options include 2-channel independent control and center tap output to meet diverse requirements.
Specification
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High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
