Coming Soon
High-voltage Power Supply for Electrostatic Chucks
Visualizes previously undetectable adsorption.
Achieve zero wafer transfer failures.
The era of ESC control has shifted from simple application to intelligent monitoring and control. Introducing the next-generation standard for enhanced process efficiency and safety.
Matsusada Precision’s newly engineered ESC high-voltage power supply not only delivers stable, high-quality output but also provides real-time monitoring and precise control over wafer holding conditions.
In advanced semiconductor fabrication, the risk of damage to high-value wafers from transport errors is unacceptable.
New High-voltage Power Supply for Electrostatic Chuck Series, featuring its proprietary "Wafer Sensing Function," accurately determines wafer chucking status by detecting minute changes in capacitance, confirming both secure holding and complete de-chucking (release). This significantly mitigates the risk of wafer damage caused by de-chucking failures.
Furthermore, continuous monitoring of minute leakage current-an indicator of ESC aging-enables predictive maintenance and prevents costly, unexpected line stoppages. With standard EtherCAT communication and a built-in arbitrary waveform generation feature, New High-voltage Power Supply for Electrostatic Chuck Series supports the construction of intelligent, high-precision fabrication lines.
FEATURES AND BENEFITS
- Ultra-Compact Half-Rack Design: Ideal for space-constrained systems.
- Enhanced Throughput: Smooth, high-speed de-chucking via advanced polarity reversal.
- Reliable Chucking/De-chucking: Integrated Wafer Sensing ensures secure holding status monitoring.
- High-Performance Amplifier Architecture. Ultra-Fast Response & Extended Service Life: Achieved without mechanical relays for polarity switching.
- Supports diverse chucking requirements with options including 2-Channel Independent Control and Center Tap Output.
Specification
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High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2025-08-01 rev 11
PDF (2,307 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
On this website, we provide only the latest versions of information and instruction manuals for our products. Therefore, the newest versions of manuals on the website may differ from those that came with products you purchased in the past.
