Module Type E-Chuck Power Supplies
Matsusada Precision leverages decades of specialized experience to offer a premier range of high voltage power supply modules, specifically engineered for the most demanding electrostatic chuck (ESC) applications. Embodying our commitment to Japanese quality and reliability, these modules provide the exceptional performance and stability essential for cutting-edge semiconductor manufacturing, flat-panel display production, and other precision material handling systems.
Our ESC power supply modules are designed to empower your technology. The compact, high-density designs allow for seamless integration into sophisticated OEM systems where space is at a premium, without sacrificing power or performance. Achieve superior wafer and substrate control with key features like fast-response polarity reversing, low noise output, and stable, repeatable operation. This precision is instrumental in improving yields and increasing throughput in critical processes like lithography, etching, and ion implantation.
From initial R&D to full-scale production, our modules offer a reliable and versatile power solution. Choose from a wide selection of models or consult with our experts to develop a custom solution tailored to your exact specifications. Elevate your system's performance and reliability with a power supply partner you can trust.
