Module Type E-Chuck Power Supplies
Matsusada Precision offers high-voltage power supply modules specifically engineered for electrostatic chuck (ESC) applications. Designed for high reliability and stability, these modules provide the precise performance required for semiconductor manufacturing, flat-panel display production, and other material handling systems.
An ideal choice for OEM integration, these modules feature a compact, high-density design suitable for systems where space is limited. Key capabilities include fast-response polarity reversing, low ripple noise, and high stability, ensuring superior wafer and substrate control. These features help improve yields and throughput in critical processes such as lithography, etching, and ion implantation.
We support a wide range of requirements, from R&D to full-scale mass production. In addition to our standard lineup, custom configurations are available to meet specific voltage or integration needs. Please contact us for more information or to discuss your specific requirements.
