• PZS series | Piezo Actuator | Matsusada Precision
  • PZS series | Piezo Actuator | Matsusada Precision
  • PZS series | Piezo Actuator | Matsusada Precision
  • PZS series | Piezo Actuator | Matsusada Precision
Discontinued

Micro Stages

  • Piezo Stage
  • Maximum stroke:
    100µm
  • Resolution in nano order
  • High speed response

PZS series is no longer available as we have stopped the production and sales this model in March 2022. Meanwhile, we support.

High speed response Micro Stages

Features and Benefits

  • Resolution in nano order
  • High speed response
  • Applicable to closed-loop control
  • Nonmagnetic materials are used

Applications

  • Positioning of mask-wafer
  • Interferometer
  • Positioning of fiber
  • Test of disc-drive
  • Relevant equipment for biotechnology
  • Relevant equipment for semiconductor
  • Piezo applications

Models

Models Displacement * Axis Linearity Capacitance Resonant frequency Sensor Material Treatment
PZS40 80 µ m X 0.1% 1.8 µF 1000 Hz Strain Gauge SUS -
PZS80-1 100 µm X 0.1% 3.4 µF 500 Hz Strain Gauge AI Black-Anodizing

* Values for closed-loop control with our PZJ-0.12BS series

Specifications

For details, download the datasheet below.

Options

N: No displacement sensor.

(BNC): BNC connector for control cable.

How to Order

When ordering, add Option No. in the following order by with or without displacement sensor, and connector to Model No.
Example:
PZS40N(BNC)

Extension cable is applicable (up to 4 meters)

If extension cables are required, please inform our sale staff its type and length of the cable as bellow.

  • N (no sensor) and no option: PZ extension cable **(#)
  • N (no sensor) but with a option: PZN extension cable **(#)
  • **: not filled = both ends of control cable; LEMO/Filled LB = one end of control cable; BNC/Filled BB = both ends of control cable; BNC
  • #: Fill digits of the cable length in meter.

How to Order

Example:
  • PZN ext. cable(4): both ends of the cable are LEMO Length is 4 meters.
  • PZ ext. cableLB(2): one end of cable is BNC Length is 2 meters.

Dimensions

For details, download the datasheet below.

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