EC Series

Electrostatic chuck power supplies - Dual output rack mount

High Voltage Power Supplies for Electrostatic Chuck EC Series

2ch output, Rack mount Reversible type ±1 kV to ±10 kV/200 W

EC series are a high voltage power supplies developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems (2ch) or bi-polar systems. Correspond to both Johnson-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.

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EC datasheet

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Feature&Outline


Specification

Output
Power[W] Voltage[kV]
200 ±1 to ±10

Example of waveform

HV Power Supplies EC Series Waveform



Example of forced discharge • Output relay

HV Power Supplies EC Series Output relay



Options

HV Power Supplies EC Series Options

How to Order When ordering, suffix the above option mark to the model number.
e.g EC-1R200x2-LRf (13.56 M) Ry (220 V) (7 m)
Alphabetical, input voltage and cable length order

Input/Output cable (Accessory)

HV Power Supplies EC Series I/O cable

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EC datasheet

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