Matsusada Precision is a leading company in high-voltage power supply. As a comprehensive power supply manufacturer, products of Matsusada Precision have advantages in size, performance, and reliability.
2ch output, Rack mount Reversible type ±1 kV to ±10 kV/200 W
EC series are a high voltage power supplies developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems (2ch) or bi-polar systems. Correspond to both Johnson-Rahbek type, Coulomb type because of wide product range ±1 kV to ±10 kV.
|200||±1 to ±10|
How to Order
When ordering, suffix the above option mark to the model number.
e.g EC-1R200x2-LRf (13.56 M) Ry (220 V) (7 m)
Alphabetical, input voltage and cable length order