ECU Series

E-chuck HV Power Supplies

High Voltage Power Supplies for Electrostatic Chuck ECU Series

Compact HV supplies for E-chuck application

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Best fit for OEM application with its ultra compact design

Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.

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ECU datasheet

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Feature & Outline

Main features

Possible applications

Lineup

More high voltage models are available. Contact nearby sales office.

Output Model
Voltage [kV] Current [mA]
±0.5 10 ECU-0.5PN10(R)
±1 3 ECU-1PN3 (R)
±1.5 2 ECU-1.5PN2 (R)
±2 1 ECU-2PN1 (R)
±2 3 ECU-2PN3 (R)
±4 1 ECU-4PN1 (R)
±5 2 ECU-5PN2 (R)

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