ECU Series

E-chuck HV Power Supplies

High Voltage Power Supplies for Electrostatic Chuck ECU Series

Compact HV supplies for E-chuck application

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Best fit for OEM application with its ultra compact design

Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.

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Feature&Outline

Main features

Possible applications

Specification

Output
Voltage [kV] Current [mA]
±0.5 10
±1 3
±1.5 2
±2 1
±2 3
±4 1
±5 2
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